6 results on '"Villarrubia J"'
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2. 3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology?
3. Optimizing hybrid metrology through a consistent multi-tool parameter set and uncertainty model
4. Sensitivity of SEM width measurements to model assumptions
5. Bias reduction in roughness measurement through SEM noise removal
6. Unbiased estimation of linewidth roughness
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