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This paper reports on an alternative method for precise and uniform fabrication of 100μm-thick SU-8 microstructures on small-sized or non-circular samples. Standard spin-coating of high-viscosity resists is indeed known to induce large edge beads, leading to an air gap between the mask and the SU-8 photo-resist surface during UV photolithography. This results in a non uniform thickness deposition and in a poor pattern definition. This problem becomes highly critical in the case of small-sized samples. To overcome it, we have developed a soft thermal imprint method based on the use of a nano-imprint equipment and applicable whatever sample fragility, shape and size (from 2cm to 6 inches). After final photolithography, the SU8 pattern thickness variation profile is measured. Thickness uniformity is improved from 30% to 5% with a 5μm maximal deviation to the target value over 2cm-long samples.

We report on the optimized design of a polymer-based actuator that can be directly integrated on a VCSEL for vertical beam scanning. Its operation principle is based on the vertical displacement of a SU-8 membrane including a polymer microlens. Under an applied thermal gradient, the membrane is shifted vertically due to thermal expansion in the actuation arms induced by Joule effect. This leads to a modification of microlens position and thus to a vertical scan of the laser beam. Membrane vertical displacements as high as 8μm for only 3V applied were recently experimentally obtained. To explain these performances, we developed a comprehensive tri-dimensional thermo-mechanical model that takes into account SU-8 material properties and precise MOEMS geometry. Out-of-plane mechanical coefficients and thermal conductivity were thus integrated in our 3D model (COMSOL Multiphysics). Vertical displacements extracted from these data for different actuation powers were successfully compared to experimental values, validating this modelling tool. Thereby, it was exploited to increase MOEMS electrothermal performance by a factor higher than 5.

We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.

Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.

We report on the design and the fabrication of refractive microlenses using a polymer droplet deposition microsystem. The principle of this original technique consists in monomer droplets deposition using a robotized silicon-microcantilevers array. The advantages of this technique rely on the control of droplets dimensions and the positioning accuracy. Microlenses have been first modelled to optimize their geometrical parameters for VCSEL collimation. Results of lens optimization as well as the influence of the fabrication parameters fluctuations on the final divergence are detailed. First results on droplets deposition are presented, demonstrating the technique feasibility. Finally, the possibility of the modification of the surface energy to obtain the most suited contact angle before deposition is also discussed.

We present an optical microsystem aimed to be integrated into a nanomechanical biosensor for functional genomic analysis. The operation principle is based on a sub-nanometer resolution optical measurement of a cantilever deflection caused by a surface stress when the target nucleic acid sample hybridises to the nucleic acid probe on the active side of the cantilever. The resulting deflection, of the order of nanometers, is measured by an optical system, in which a laser beam reflects off the back of the cantilever to a position sensitive photo-detector. We report in this paper on the design, fabrication and test of the optical head associated with an optical coupling system which enables detection of the presence of target nucleic acid on the cantilever by amplifying the deflection caused by the stress.

VCSELs (Vertical Cavity Surface Emitting Lasers) are nowadays more and more exploited in optoelectronic applications, monitoring their lasing power in a compact and low cost manner becomes crucial. To collect and control the output light, an external photodetector associated with an optical microlens array can be used. Integrated solutions based on the use of a bulk or QW photodetection section added in single-or double-cavity structures have also been proposed. Here, we have investigated a simpler solution based on a standard VCSEL array. Light emitted by a VCSEL has been electrically detected by adjacent VCSELs located in the same array, using in plane optical waveguiding of spontaneous emission in the intrinsic central zone of the devices. We show that the detected photocurrent can be related to the power of the emitting VCSEL. Signal intensity has been studied as a function of VCSELs distance. This method could lead to a more efficient way to monitor VCSEL emission.

We present here a design of a coupling element aimed to be integrated into a nanomechanical biosensor for functional genomic analysis. The operation principle is based on a sub-nanometer resolution optical measurement of a cantilever deflection caused by a surface stress when the target nucleic acid sample hybridizes to the nucleic acid probe on the active side of the cantilever. The resulting deflection, of the order of nanometers, is measured by an optical system, in which a laser beam reflects off the back of the cantilever to a position sensitive photo-detector. We study in this paper three polymer optical coupling systems which could allow to detect the presence of target nucleic acid on the cantilever by amplifying the deflection caused by the stress.

An electronic circuitry is proposed and implemented to optimize the ignition process and the robustness of a microthruster. The principle is based on the integration of propellant material within a micromachined system. The operational concept is simply based on the combustion of an energetic propellant stored in a micromachined chamber. Each thruster contains three parts (heater, chamber, nozzle). Due to the one shot characteristic, microthrusters are fabricated in 2D array configuration. For the functioning of this kind of system, one critical point is the optimization of the ignition process as a function of the power schedule delivered by electronic devices. One particular attention has been paid on the design and implementation of an electronic chip to control and optimize the system ignition. Ignition process is triggered by electrical power delivered to a polysilicon resistance in contact with the propellant. The resistance is used to sense the temperature on the propellant which is in contact. Temperature of the microthruster node before the ignition is monitored via the electronic circuitry. A pre-heating process before ignition seems to be a good methodology to optimize the ignition process. Pre-heating temperature and pre-heating time are critical parameters to be adjusted. Simulation and experimental results will deeply contribute to improve the micropyrotechnic system. This paper will discuss all these point.

The increasing interest for high-speed, compact and low cost devices for optoelectronic applications such as bi-directional optical interconnects, optical imaging or telemetry has recently led to focus on the ability for the vertical-cavity surface-emitting lasers to be used as resonant cavity enhanced photodetectors for dual-purpose applications. Here we present results on design, fabrication and characterization of an oxide-confined 830nm top-emitting laser for self-aligned emission and photodetection. In this single-cavity GaAs-based device, submitted alternatively to forward and reverse bias, the oxide layer is not only used to obtain a single mode emission but also to enable decoupling between a small surface emission and a large surface detection. However the optical path is observed to change because of the refractive index difference between the oxidized and non-oxidized zones of the structure. This leads to a detrimental blue-shift on the wavelength of the Fabry-Perot cavity mode. In this work, we demonstrate this effect in photodetection by the means of spatially localized photocurrent and reflectance spectra measurements. These results show that the photocurrent is correctly collected in the whole device despite of the presence of an oxide layer. The results obtained on selective etching for optimisation of this dual-purpose device are presented.