1. High-performance mid-infrared filter arrays for gas sensing
- Author
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Hakkel, Kaylee D., Petruzzella, Maurangelo, Ebermann, Martin, Pagliano, Francesco, van Elst, D.M.J., van Klinken, Anne, Fiore, Andrea, Semiconductor Nanophotonics, and Photonics and Semiconductor Nanophysics
- Abstract
We have developed a static Fabry Perot based filter array operating in the mid-infrared range from ~2 to 4.5 μm, matching the absorption region of several volatile organic compounds. Each filter consists of a cavity system formed by two distributed bragg reflectors with a tuning element with varying length in between. The filters with high transmission (>80%) and controllable transmission peak width are integrated with an array of pyroelectric detectors. The robustness, easy-fabrication and the possibility to tune the optical response to a specific application make the integrated filter arrays suitable for compact sensing systems.
- Published
- 2022
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