1. Failure analysis of MEMS RF cantilevered beam switch
- Author
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Rongjin Zhu, Fangmin Guo, Jianguo Yu, Yuping Ge, Zongshen Lai, Peisheng Xin, Lu Wei, Chengshi Li, Ziqiang Zhu, and Xin Xu
- Subjects
Microelectromechanical systems ,Engineering ,Cantilever ,business.industry ,Optical engineering ,Threshold voltage ,RF switch ,Software ,Hardware_GENERAL ,Electronic engineering ,Optoelectronics ,Time domain ,business ,Voltage - Abstract
A surface MEMS miniature switch with the cantilevered arm has been made on low resistivity Si substrate. The switch was inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage, demonstrating some relationship among lifetime and threshold voltage. The structure of MEMS RF switch is simulated by ANSYS software, doing some failure analysis and discussing difference comparing the experiment.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
- Published
- 2004
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