Author: "Rösch, Matthias" / Publisher: spie - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Rösch, Matthias"' showing total 2 results

Start Over Author "Rösch, Matthias" Publisher spie

2 results on '"Rösch, Matthias"'

1. High-NA EUV lithography: The next step in EUV imaging (Conference Presentation)

Author: van Setten, Eelco, primary, McNamara, John, additional, van Schoot, Jan, additional, Bottiglieri, Gerardo, additional, Troost, Kars, additional, Fliervoet, Timon, additional, Hsu, Stephen, additional, Zimmermann, Jörg, additional, Neumann, Jens-Timo, additional, Rösch, Matthias, additional, and Graeupner, Paul, additional
Published: 2018
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2. Imaging performance of EUV lithography optics configuration for sub-9nm resolution

Author: Neumann, Jens Timo, additional, Rösch, Matthias, additional, Gräupner, Paul, additional, Migura, Sascha, additional, Kneer, Bernhard, additional, Kaiser, Winfried, additional, and van Ingen Schenau, Koen, additional
Published: 2015
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