7 results on '"Makhotkin, Igor A."'
Search Results
2. Si transfer and self-limiting chemisorption on Ru thin film surface in hydrogen radicals environment
3. Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
4. Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range
5. Determining the transmission of thin foil filters for soft X-ray free-electron laser radiation: an ablation imprint approach (Conference Presentation)
6. Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
7. Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
Catalog
Books, media, physical & digital resources
Discovery Service for Jio Institute Digital Library
For full access to our library's resources, please sign in.