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5. Correction of different spatial frequency errors of large and thin optical windows based on ion beam figuring

Author

Ma Ping, Wang Gang, Rui Jie Li, Xie Lei, Ding Yao Yan, Cai Chao, Jin Yong Huang, Xu Hua Gao, and He Xiang

Subjects
Figuring, Wavefront, Materials science, Ion beam, business.industry, Polishing, Laser, law.invention, Optics, law, Surface roughness, Spatial frequency, business, Adaptive optics
Abstract

The large and thin plane optical windows are used in large high power laser devices. Typically conventional methods such as stressed-lap polishing and small-tool pitch polishing are used to manufacture these optics. Nevertheless, the required wavefront accuracy cannot be achieved by the last smal-tool pitch polishing process which can lead to middle spatial frequency errors and high-slope errors because of the edge effect , unstable removal rate and pressure -loaded deformation. Ion Beam Figuring (IBF) technology is an optical fabrication method which can highly correct different spatial frequency errors due to the highly deterministic, highly stable, very small tools and noncontact. In this paper, IBF was employed to correct different spatial frequency errors of a large and thin plane optical windows. Before IBF, transmission wavefront error of the substrate was 0.51λ PV, 32.3nm/cm GRMS, 2.91nm PSD1, 0.27nm PSD2, 0.38nm Rq after being polished by double-sided polishing machine, and was improved to 0.07λ PV, 2.1nm/cm GRMS, 1.76nm PSD1, 0.13nmPSD2, 0.33nmRq after only two IBF(about thirty six hours processing time). All spatial frequency errors reached the required values.

Published
2020

6. Plasmonic modulators and photodetectors for communications

Author

Ma, Ping, primary, Salamin, Yannick, additional, Messner, Andreas, additional, Bäuerle, Benedikt, additional, Emboras, Alexandros, additional, Heni, Wolfgang, additional, Josten, Arne, additional, Eltes, Felix, additional, Abel, Stefan, additional, Fompeyrine, Jean, additional, Elder, Delwin, additional, Dalton, Larry, additional, and Leuthold, Juerg, additional

Published
2021
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14. Generating mechanism and eliminating method of striated haze in advanced mitigation process

Author

Ma Ping, Zhao Heng, He Xiang, Huang Jinyong, and Cai Chao

Subjects
Acoustic field, Haze, Materials science, business.industry, Process (computing), Optical field, Laser, eye diseases, law.invention, Etching (microfabrication), law, Optoelectronics, sense organs, business
Abstract

Advanced mitigation process (AMP) has been identified as a most effective method to improve the laser induced damage threshold of the fused silica optics used in the large laser facility, and as the most important sub-process HF etching with multi-frequency megasonic agitation plays a decisive role to improve the damage threshold of fused silica. But because of the physical characteristics of megasonic, the etched surface is apt to generate striated haze which not only modulates the optical field, but also reduces the damage threshold significantly. In this paper, the generating mechanism of the striated haze is discussed, and both of the uneven acoustic field distribution and the optics' redeposited substance are recognized as the primary factor resulted this phenomenon, ultimately based on these discussions a slight swing when etching is proposed to eliminate this phenomenon.

Published
2019

15. Investigation on the control technique of surface roughness for silicate glass

Author

Ma Ping, Yan Dingyao, Cai Chao, Xie Lei, Hu Qing, Huang Jinyong, and He Xiang

Subjects
Materials science, Chemical-mechanical planarization, Surface roughness, Polishing, Particle size, Large aperture, Composite material, Silicate glass
Abstract

The influence of polishing parameters such as particle size, pad material and pressure on the surface roughness of glass optics were investigated and analysed. It reveals that the surface roughness will get worse with increase of the polishing particle size. The surface roughness would remain stable in a certain period of polishing pressure, but get worse with increase of the pressure beyond the period. The surface roughness is getting better when using smooth pitch polishing pad than polyurethane pad with lots of micropores. By optimizing the polishing parameters, the surface roughness of large aperture fused silica window is improved to 0.46nm before band-pass filtering and 0.084nm after band-pass filtering.

Published
2019

16. Effect of etching parameters on the surface quality and laser damage thresholds of fused silica with megasonic-assisted HF acid etching

Author

Huang Jinyong, Zhao Heng, Cai Chao, Wang Gang, He Xiang, and Ma Ping

Subjects
Materials science, Acid etching, business.industry, fungi, technology, industry, and agriculture, Laser, Grinding, law.invention, Quality (physics), Laser damage, Etching (microfabrication), law, Chemical-mechanical planarization, Optoelectronics, business
Abstract

HF-based etching has been an effective method to increase the laser induced damage thresholds (LIDTS) of fused silica optics. In this research, the effect of etching parameters on the surface quality and laser damage performance of fused silica with Megasonic-assisted HF acid etching has been investigated systematically. The fused silica samples (50mm in diameter and 5mm thick) were maufactured through the conventional grinding and chemical mechanical polishing process, these processed samples are etched with different etching parameters. Our results show that the frequency and distribution of megasonic field will bring great effect on the surface quality of optics. The LIDTS were measured by 1- on-1 mode, results showed that the 1.3MHz megasonic field and a certain amount of etching depth will benefit the laser damage performance of fused silica optics.

Published
2019

31. The technical research on fabricating large aperture flat SiC mirror

Author

Zhao Heng, Ma Ping, Zhu Heng, Yan Dingyao, and Bao Zhenjun

Subjects
Materials science, Aperture, business.industry, Process (computing), Polishing, Material removal, Large aperture, Flat mirror, Root mean square, chemistry.chemical_compound, Optics, chemistry, Silicon carbide, business
Abstract

A 520mm aperture SiC flat mirror was manufactured up to RMS accuracy of 10.8nm in 50 days. Through the analysis of SiC material removal principle during full aperture polishing, we chose the appropriate parameters of polishing in full aperture polishing process and quickly made the surface error convergence to RMS value 100nm, then we took the step to small tool polishing, the adjustment of the remove function in this process was taken in order to coordinate the hard material’s properties, the efficiency in PV and RMS convergence was presented according to the experimental results. After four week’s polishing ,the RMS value successfully reduced to 10.8 nm and reached the technical requirements of this large flat SiC mirror.

Published
2016

32. Study on fine annealing process of the large-aperture K9 glasses

Author

Qiu Fu Min, Li Li Zheng, Xie Lei, Yan Ding Yao, Wang Gang, Liu Yi Bin, Zhang Hui, and Ma Ping

Subjects
Optics, Materials science, business.industry, Transition temperature, Polishing, Large aperture, Stress distribution, business, Internal stress, Annealing (glass)
Abstract

Study on fine annealing process of the large-aperture K9 glasses was carried out in the report. The process parameters of glass placed way, fan speed and design of the cavity for keeping temperature uniformity were attained. By the fine annealing experiment, the stress distribution was improved evidently. The stress changed from Irregular distribution to consistency symmetric distribution and the stress max was reduced. The surface profile accuracy of the large-aperture K9 glasses was controlled steadily during CNC polishing.

Published
2016

40. Rapid fabrication of lightweight SiC mirror using CCOS

Author

Ma Ping, Ding-yao Yan, Heng Zhu, and Xia-lai Liu

Subjects
Engineering drawing, Materials science, Fabrication, business.industry, Diamond, engineering.material, Flat mirror, chemistry.chemical_compound, Optics, chemistry, Silicon carbide, engineering, Rapid convergence, Batch production, business
Abstract

A 500mm class SiC flat mirror was polished up to 21nm (RMS value) with CCOS in a very short period. The lightweight mirror structure, the mount method, the choose of the diamond powder, the CCOS procedure is presented in the paper. In addition, the efficiency of the procession is further be analyzed to make the batch production of this kind of hard material mirror be possible.

Published
2011

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