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2 results on '"Guoqing You"'

1. CMOS compatible broadband graphene/silicon nanocrystals photodetectors

Author

Zhengyi Cao, Guanghua Tang, Dongchen Wang, Xu Pengxiao, Yun Wu, Wang Yan, and Guoqing You

Subjects
Materials science, business.industry, Graphene, law, Broadband, Photodetector, Optoelectronics, Silicon nanocrystals, business, Cmos compatible, law.invention
Published
2020

2. Ultra-thin benzocyclobutene bonding of InGaAs PIN photodetector onto silicon photonic chip

Author

Guoqing You, Guanghua Tang, Dongchen Wang, Yuechan Kong, Wang Yan, and Xu Pengxiao

Subjects
Materials science, Silicon photonics, business.industry, Photodetector, Grating, Chip, Waveguide (optics), Responsivity, chemistry.chemical_compound, chemistry, Benzocyclobutene, Optoelectronics, business, Layer (electronics)
Abstract

Ultro-thin benzocyclobutene（BCB）bonding process has been proposed as a solution of InGaAs/Si optoelectronic heterogeneous integration. Here, we present a process of InGaAs PIN photodetector bonding onto silicon photonic chip, an ultra-thin bonding layer below 400nm is applied. Silicon photonic chip was fabricated by CMOS compatible process. In order to importing and exporting the light, a focal grating coupler was designed and fabricated, and fiber-to-chip efficiency was 37.7%. InGaAs PIN photodetector responsivity was 0.95A/W which taped out on 3 inch standard InP process. The result presented that the responsivity deterioration coefficient was below 1dB, and the coupling efficiency from Si waveguide to InGaAs photodetector was 41.8%.

Published
2020

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