1. Imaging ellipsometer with large field-of-view
- Author
-
He Hongbo, Gu Liyuan, Zhang Shanhua, Zeng Aijun, Huang Huijie, Shiyu Hu, Weilin Cheng, Guohang Hu, and Yuan Qiao
- Subjects
Large field of view ,Materials science ,business.industry ,Scheimpflug principle ,Autocollimator ,Polarizer ,Sample (graphics) ,law.invention ,Tilt (optics) ,Optics ,law ,Ellipsometry ,Optoelectronics ,Charge-coupled device ,business - Abstract
A polarizer-compensator-sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified.
- Published
- 2016