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In this work we explore the use of infrared deflectometry in the case of dynamic vibration measurements. This work also aims to provide a comparison of the performances and implementations of visible and infrared deflectometry with measurements conducted on a laboratory test case, a cantilever aluminium beam under impact excitation. The results obtained show that both visible and infrared deflectometry enable measurements with different time and space resolutions, and that infrared deflectometry can be effectively used to perform full-field vibration measurements on an unprepared surface. It could be simply summarized that both techniques have interesting features, and what is earned with one of these techniques is lost on the other. In fact, even if the cameras used for visible and infrared deflectometry techniques have different technical features that directly influence reachable time and space scales, a key advantage is that established methods and algorithms for images post-processing are identical between visible and infrared deflectometry. This practically broadens the range of materials and surfaces that can be tested using the deflectometry technique. The extension of this technique to curved structures is also under consideration, which should provide another additional support to a greater use of deflectometry. With the increasing performance of visible and infrared high-speed cameras combined with their decreasing cost, the measurement of space- and time-resolved experimental data using the non-contact optical deflectometry techniques opens interesting perspectives.

We demonstrate that full-field deflectometry is a viable alternative to interferometry for the characterization of free-form mirrors. Deflectometry does not require the use of a CGH. Instead of measuring the surface height map, the deflectometer measures the surface slopes in two orthogonal directions using the phase-shifting Schlieren method [1]. The surface height map is then reconstructed by integration of the slope maps. We present two instruments. The first one can be mounted in the lathe for in situ measurement. The second is adapted for the characterization of large concave mirrors.

Optical coherence tomography is widely used in the non-invasive detection of skin cancer. We are proposing an image guiding system integrated in a full-field OCT (FF-OCT) system and an image matching algorithm to register the guiding image onto a dermoscopic image. This guiding system takes the objective optics of FF-OCT system to observe the same vision with OCT. The FOV of the guiding image and FF-OCT is 2*2mm2 and 500*500μm2 respectively. The spatial relation between OCT and the guiding image system is fixed, the OCT imaging location can also be identified. The guiding image is then matched into the clinically used dermoscopic image which has a 20*20 mm2 FOV by an image matching algorithm. The FF-OCT image can be registered on the dermoscopic image through the guiding image. This allows physicians to target the scanning area precisely in the lesion, and record the scanned point to confirm the full lesion. This invention improves the efficiency of the entire examination and allows to follow-ups the lesion at different time.

The treatment of macular diseases requires frequent monitoring by optical coherence tomography (OCT). Home monitoring would reduce the burden of frequent clinical visits and increase therapy adherence. In a pilot study with 47 patients having different macular diseases we tested a proprietary self-examination low-cost full-field OCT (SELFF-OCT). For comparison, scans with a standard clinical spectral domain OCT were taken. Data was graded by a reading center. Patients were able to successfully acquire images that were clinically gradable for 85% of the included eyes. The sensitivity and specificity for an anti-VEGF treatment decision based on the SELFF-OCT was 0.94 and 0.95, respectively.

Off-axis full-field OCT is intended to enable cost-effective imaging of the retina for home diagnosis. Different to common FD-OCT systems, the lateral field of view is acquired in a single shot and the different axial layers are acquired sequentially. During acquisition, motion of the eye results in motion artifacts and misaligned layers. We present a method to track the axial and lateral position of the retina by analyzing the angle and divergence of the backscattered light with a lateral precision of 3.6 µm and an axial precision of 29 µm. This information can be used to correct motion induced errors.

Dynamic FFOCT allows us to record the intrinsic motion of biological samples in 3D, over hours. We performed scratch assays on primary porcine RPE and human induced pluripotent stem cells derived RPE cell cultures. We plotted motion maps from the optical flow. For wounds

The generation of an optical supercontinuum with short (fs) input pulse duration is a highly complex process that exhibits rich nonlinear dynamics. Here, we show that one can teach a machine learning model to learn the nonlinear dynamics of ultrashort pulse propagation and predict the full-field propagation dynamics of supercontinuum based only on the input pulse characteristics (peak power, duration and chirp).

Recent OCT based investigations in humans and in experimental animals have shown that rods and cones outer segments elongate in response to light stimuli. In this manuscript we describe our efforts to implement phase-based “optoretinograms” (ORG) analysis framework to retinal images acquired with standard raster scanning FD-OCT system, that offers much lower phase stability compared to full field or line field OCT acquisition schemes. Our initial results, acquired in anesthetized mice in vivo, showcase successful extraction of phase-based ORG signal and its favorable comparison with intensity-based ORG signal extracted from the same data sets.

Dynamic-focusing optical coherence tomography (OCT) can provide ~1-μm isotropic resolution in extended depth of field, and Mirau design is preferred because of lower weight. In previous works, we reported a Mirau-type OCT based on high-radiance spatially-incoherent source. However, the illumination intensity is limited by the etendue. Besides, coherent artifacts increases with the partially coherent illumination scheme. In this report, we introduce a method to narrow illumination linewidth to 5 μm and reduce coherence area to 1 μm2. With spatially incoherent illumination, optimized throughput and low-weight design, low-speckle B-scan can be acquired within 0.25 second.

We demonstrate functional in vivo imaging of photoreceptor and neuronal layers within the living human retina by looking at the expansion of their optical path length. To this end, we use a special full-field swept-source optical coherence tomography system that acquires all lateral points in parallel, achieving a high-speed data acquisition with up to 200 volumes per second. A combination of computational motion and aberration correction with a suitable phase evaluation scheme yields minuscule changes after exposing the photoreceptors to a white light stimulus.

Dynamic FFOCT allows us to see the sub-cellular motion of biological samples. We are able to follow the evolution in the same plane of biological samples for hours thanks to an autofocus procedure. RPE cells are involved in the integrity of retina and vision. We performed a linear scratch assay in RPE cell culture with a surgical scalpel blade, inducing border cell migration at 20.8 µm/h to close the scratch. We also recorded motility of microvilli, thanks to rapid GPU computing. Quantitative live imaging of RPE cell culture with DFFOCT is useful in development of disease models of retinal degeneration.

To achieve 3D high-cellular resolution, a great effort, in the past years, was made to develop Adaptive Optics (AO)-OCT systems. However, such systems require quite complex, expensive and cumbersome hardware, making clinical transfer challenging. Recently, we demonstrated that the use of spatially incoherent illumination in Time-Domain Full-Field (FF)-OCT offers a valuable advantage: the lateral resolution is almost insensitive to ocular aberrations that only affect the FF-OCT signal level. We took advantage of this property to image in-vivo photoreceptor mosaic without using an AO technique. Nevertheless, the FF-OCT technique was still facing some challenges in providing consistent and reproducible images, mainly due to axial eye motion and reduced signal level. Here, we present the Adaptive Glasses-assisted FF-OCT, where an adaptive lens is placed just in front of the eye, like spectacles, enabling correction of the first 10 Zernike polynomials, increasing the FF-OCT signal level.

Using phase-sensitive full-field swept-source optical coherence tomography we already showed that morphological changes in the photoreceptor outer segments are detectable. Those signals manifest themselves in an elongation of the optical path length. Using improved post.processing we report on progress in detecting signals in the neuronal layers of the human retina. The spatially resolved signals show a characteristic time course and by combining these with simultaneous measurements of the photoreceptors we were able to generate a wiring map of the neuronal retina.

In vivo rat brain imaging was demonstrated using the FF OCM (full field optical coherence microscopy) with SMMF (short multimode fiber) of a diameter of 125 μm and a length of 7.33 mm. The spatial resolution was measured to be 2.0 μm. The influences of motions for OCM images and methods to detect motions were investigated using image processing. Measurements were combinations of 3D OCM imaging (M1) with measurement time 10min and en face imaging (M2) at fixed depth with 17.9 fps and the interval time of 1 min during 30 min. For Rat 1 measured point was at the prim somatosens cortex, and the insertion length (IL) was 3.2 mm, the motions were not remarkable. En face OCM images with the region of X 56.3 μm, Y 56.3 μm, and Z 110 μm were measured. For Rat 2 measured point was at med parietal association cortex, and IL was 3.1 mm. Difference images and those intensity profiles showed the lateral motion of 5 µm between two sequent en face OCM images. For both cases, 3D images similarly showed the spatial arrangement of nerve fibers. The feasibility that the motions of tissues could be detected under the SMMF using sequential difference images was shown. This might be applicable to detect the motions in deep areas in measurements such as the optical intrinsic imaging

Aberration-corrected imaging of human photoreceptor cells, whether hardware or software based, presently requires a complex and often expensive setup. Here, we demonstrate a simple and inexpensive off-axis full-field time-domain optical coherence tomography approach to acquire volumetric data of in vivo human retina. Full volumetric, laterally phase stable data are recorded. The lateral phase stability allows computational aberration correction, which enables us to visualize single photoreceptor cells. In addition, our approach is able to correct large aberrations and is thus feasible for the numerical correction of ametropia in post processing. Our implementation of full-field OCT combines a low technical complexity with the possibility to use the phase of the recorded light for computational image correction.

In recent years, brain research has made a lot of progress with the help of new techniques such as fMRI. Most insights were gained on animal models and thus have a limited applicability to human subjects. The generation and application of human stem-cell-derived functional neural circuits therefore promises novel insights, e.g. into neurodegenerative diseases. These networks are often studied in vitro using multielectrode arrays for electrical stimulation and recording, often at low spatial resolution and specificity. Optogenetics allows for the functional control of genetically altered cells with light stimuli at high spatiotemporal resolution. Current optogenetic investigations of human neural networks are often conducted using full field illumination, potentially masking important functional information. To circumvent this, we built a holographic beam shaping setup using a fast ferroelectric spatial light modulator for single cell optogenetic stimulation, which we presented previously [1]. We achieve a lateral resolution of 8 µm in a field of view of 1.5x1.5 mm at a maximum temporal resolution of 0.6 ms using binary Fresnel holograms. In the presentation, we will first discuss our setup. Then, we will present our experiments and results on the spatiotemporal investigation of iPSC-derived human neural networks expressing wild-type channelrhodopsin-2 [2]. [1] F. Schmieder, M. Henning, L. Buttner, S. Klapper, K. Lenk, V. Busskamp, J. Czarske, “Targeted optogenetic investigation of in vitro human iPSC-derived neuronal networks”, SPIE Photonics West, 27.01.-01.02.2018, San Francisco, USA [2] Klapper, S. D.; Sauter, E. J.; Swiersy, A.; Hyman, M. A. E.; Bamann, C.; Bamberg, E.; Busskamp, V. On-demand optogenetic activation of human stem-cell-derived neurons. Sci. Rep. 2017, 7, 14450

Full-Field Optical Coherence Tomography (FFOCT) is an effective technique for tissue anatomy imaging, allowing cancer detection through the observation of disorders in the tissue microarchitecture. Moreover, with the temporal analysis of the FFOCT signal variations, a functional dimension is added, allowing the distinction of cell types through their intracellular activity. This complementary imaging mode, called Dynamic Cell Imaging (DCI), has shown the ability to identify normal cells, cancer cells and immune cells in different types of tissue such as breast, liver or lung. On samples ranging from cell cultures to entire tissue resections, DCI signals are recorded and analyzed in order to characterize the involved endogenous biomarker at the subcellular scale. Longitudinal studies of these samples over a few hours are performed under different environment perturbations intended to modify the cell metabolism. The potential of bimodal FFOCT is evaluated through a clinical study organized at the department of breast surgery of Peking University People’s Hospital in Beijing. More than 200 breast samples and lymph nodes are included. A part of the images will be directly compared to histology to identify reading criteria and build a reference atlas. The other part will be read on a blind study to measure the ability of cancer detection with respect to histology. To take full advantage of the FFOCT and the DCI information richness for faster cancer assessment during surgeries, a computer-aided diagnostic system based on Machine Learning, and more specifically Deep Learning, is investigated.

Full Field OCT (FFOCT) is a shot noise limited interferometric microscopy technique that uses incoherent light and has proved to be an effective diagnostic tool in terms of sensitivity and specificity. We have used the FFOCT setup built by LLTech for the analysis of various cancerous tissues corresponding to the following organs: breast, skin, prostate, lungs, ENT, bladder, brain etc. The scores obtained were found in the range between 80 and 98%. To do better and to provide informations that the histology does not carry we have studied, using the same setup, the temporal dependence of our signals which we found to be related to the cellular metabolism. We have used the new high speed and high full well capacity of the Adimec camera to achieve a time analysis ranging between 2 and a few thousands of ms. We thus obtain a new contrast which constitutes a biomarker at the sub-cellular scale. We monitor the characteristic frequencies and amplitude of the signal and display them on the images of the tissues using a new processing code of the time series. This metabolic contrast also reveal the evolution of the activity of cancer cells under treatments such as chemotherapy. We will illustrate this new approach through examples of cancer tissues that are planned to be used as intraoperative tools.

Computer-aided detection (CADe) devices used for breast cancer detection on mammograms are typically first developed and assessed for a specific “original” acquisition system, e.g., a specific image detector. When CADe developers are ready to apply their CADe device to a new mammographic acquisition system, they typically assess the CADe device with images acquired using the new system. Collecting large repositories of clinical images containing verified cancer locations and acquired by the new image acquisition system is costly and time consuming. Our goal is to develop a methodology to reduce the clinical data burden in the assessment of a CADe device for use with a different image acquisition system. We are developing an image blending technique that allows users to seamlessly insert lesions imaged using an original acquisition system into normal images or regions acquired with a new system. In this study, we investigated the insertion of microcalcification clusters imaged using an original acquisition system into normal images acquired with that same system utilizing our previously-developed image blending technique. We first performed a reader study to assess whether experienced observers could distinguish between computationally inserted and native clusters. For this purpose, we applied our insertion technique to clinical cases taken from the University of South Florida Digital Database for Screening Mammography (DDSM) and the Breast Cancer Digital Repository (BCDR). Regions of interest containing microcalcification clusters from one breast of a patient were inserted into the contralateral breast of the same patient. The reader study included 55 native clusters and their 55 inserted counterparts. Analysis of the reader ratings using receiver operating characteristic (ROC) methodology indicated that inserted clusters cannot be reliably distinguished from native clusters (area under the ROC curve, AUC=0.58±0.04). Furthermore, CADe sensitivity was evaluated on mammograms with native and inserted microcalcification clusters using a commercial CADe system. For this purpose, we used full field digital mammograms (FFDMs) from 68 clinical cases, acquired at the University of Michigan Health System. The average sensitivities for native and inserted clusters were equal, 85.3% (58/68). These results demonstrate the feasibility of using the inserted microcalcification clusters for assessing mammographic CAD devices.

This paper illustrates specific features and use of optical coherence tomography (OCT) in the raster-scanning and in comparison in the full field version of this imaging technique. Cases for nondestructive testing are discussed alongside other application schemes. In particular monitoring time-dependent processes and probing of birefringent specimens are considered here. In the context of polymer testing birefringence mapping may often provide information about internal strain and stress states. Recent results obtained with conventional raster-scanning OCT systems, with (dual and single-shot) full field OCT configurations, and with polarization-sensitive versions of (full field) OCT are presented here.

Despite obvious improvements in visualization of the in vivo cornea through the faster imaging speeds and higher axial resolutions, cellular imaging stays unresolvable task for OCT, as en face viewing with a high lateral resolution is required. The latter is possible with FFOCT, a method that relies on a camera, moderate numerical aperture (NA) objectives and an incoherent light source to provide en face images with a micrometer-level resolution. Recently, we for the first time demonstrated the ability of FFOCT to capture images from the in vivo human cornea1. In the current paper we present an extensive study of appearance of healthy in vivo human corneas under FFOCT examination. En face corneal images with a micrometer-level resolution were obtained from the three healthy subjects. For each subject it was possible to acquire images through the entire corneal depth and visualize the epithelium structures, Bowman’s layer, sub-basal nerve plexus (SNP) fibers, anterior, middle and posterior stroma, endothelial cells with nuclei. Dimensions and densities of the structures visible with FFOCT, are in agreement with those seen by other cornea imaging methods. Cellular-level details in the images obtained together with the relatively large field-of-view (FOV) and contactless way of imaging make this device a promising candidate for becoming a new tool in ophthalmological diagnostics.

The current industry plan is for EUV Lithography (EUVL) to enter High Volume Manufacturing (HVM) in the 2019/20 timeframe for the 1X nm half-pitch (HP) node (logic and memory). Reticle quality and reticle defects continue to be a top industry risk. The primary reticle defect quality requirement continues to be “no reticle defects causing 10% or larger CD errors on wafer (CDE)”. In 2013, KLA-Tencor reported on inspection of EUV reticles using a 193nm wavelength inspection system1. The report included both die-to-database (db) and die-to-die (dd) inspection modes. Results showed the capability to detect a wide variety of programmed and native reticle defects judged to be critical. We have developed extensions to the 193nm wavelength (193) inspection system for the typical 2019/20 HVM EUV reticle defect requirements. These improvements include innovations in: defect enhancement methods, database modeling, defect detection, and throughput. In this paper, we report on the latest data and results of this work, focusing on EUV reticle dieto- database inspection. Inspection results are shown using typical next generation EUV programmed defect test reticles and typical full field product-like EUV reticles, all from industry sources. Results show significant defect detection improvements versus the prior generation inspection system. We also report the test results of a high throughput die-todatabase inspection mode that could be used for the typical mask shop outgoing inspection of EUV reticles where particles are the primary defect to be detected and there is no pellicle (or the pellicle transmits 193nm wavelength2).

Pancreatic cancer is one of the most feared cancer types due to high death rates and the difficulty to perform surgery. This cancer outcome could benefit from recent technological developments for diagnosis. We used a combination of standard Full Field OCT and Dynamic Full Field OCT to capture both morphological features and metabolic functions of rodents pancreas in normal and cancerous conditions with and without chemotherapy. Results were compared to histology to evaluate the performances and the specificities of the method. The comparison highlighted the importance of a number of endogenous markers like immune cells, fibrous development, architecture and more.

The feasibility of a full-field optical coherence tomography (FFOCT) system for rapid wide field optical analysis of normal and malignant human ovarian tissue pathologies was demonstrated. Five features were extracted from the normalized image histogram from 56 FFOCT images, based on the differences in the morphology of the normal and malignant tissue samples.

Transurethral resections are commonly used for bladder cancer diagnosis, treatment and follow-up. Cancer staging relies largely on the analysis of muscle in the resections; however, muscle presence is uncertain at the time of the resection. An extemporaneous quality control tool would be of great use to certify the presence of muscle in the resection, and potentially formulate a primo-diagnosis, in order to ensure optimum patient care. Full-field optical coherence tomography (FFOCT) offers a fast and non-destructive method of obtaining images of biological tissues at ultrahigh resolution (1μm in all 3 directions), approaching traditional histological sections. This study aimed to evaluate the potential of FFOCT for the quality control and the primo-diagnosis of transurethral bladder resections. Over 70 transurethral bladder resections were imaged with FFOCT within minutes, shortly after excision, and before histological preparation. Side-by-side comparison with histology allowed to establish reading criteria for the presence of muscle and cancer in particular. Images of 24 specimens were read blindly by three non-pathologists readers: two resident urologists and a junior bio-medical engineer, who were asked to notify the presence of muscle and tumor. Results showed that after appropriate training, 96% accuracy could be obtained on both tumour and muscle detection. FFOCT is a fast and nondestructive imaging technique that provides analysis results concordant with histology. Its implementation as a quality control and primo-diagnosis tool for transurethral bladder resections in the urology suite is feasible and lets envision high value for the patient.

The experimental results of speckle-correlometric analysis of such temperature-governed processes as the sol-gel transition and the foam aging are presented. Analysis of the temperature dependencies of speckle correlation time for solgel systems with embedded scatterers allows the estimation of gelation activation energy. The effect of increase in the speckle correlation time at later stages of the foam structure evolution is presumably caused by the increasing role of local avalanche-like processes in the structure formation.

Tympanic membrane (TM) thickness can provide crucial information for diagnosing several middle ear pathologies. An imaging system integrating low coherence interferometry (LCI) with the standard video otoscope has been shown as a promising tool for quantitative assessment of in-vivo TM thickness. The small field-of-view (FOV) of TM surface images acquired by the combined LCI-otoscope system, however, makes the spatial registration of the LCI imaging sites and their location on the TM difficult to achieve. It is therefore desirable to have a tool that can map the imaged points on to an anatomically accurate full-field surface image of the TM. To this end, we propose a novel automated mosaicking algorithm for generating a full-field surface image of the TM with co-registered LCI imaging sites from a sequence of multiple small FOV images and corresponding LCI data. Traditional image mosaicking techniques reported in the biomedical literature, mostly for retinal imaging, are not directly applicable to TM image mosaicking because unlike retinal images, which have several distinctive features, TM images contain large homogeneous areas lacking in sharp features. The proposed algorithm overcomes these challenges of TM image mosaicking by following a two-step approach. In the first step, a coarse registration based on the correlation of gross image features is performed. Subsequently, in the second step, the coarsely registered images are used to perform a finer intensity-based co-registration. The proposed algorithm is used to generate, for the first time, full-field thickness distribution maps of in-vivo human TMs.

Cells shape or density is an important marker of tissues pathology. However, individual cells are difficult to observe in thick tissues frequently presenting highly scattering structures such as collagen fibers. Endogenous techniques struggle to image cells in these conditions. Moreover, exogenous contrast agents like dyes, fluorophores or nanoparticles cannot always be used, especially if non-invasive imaging is required. Scatterers motion happening down to the millisecond scale, much faster than the still and highly scattering structures (global motion of the tissue), allowed us to develop a new approach based on the time dependence of the FF-OCT signals. This method reveals hidden cells after a spatiotemporal analysis based on singular value decomposition and wavelet analysis concepts. It does also give us access to local dynamics of imaged scatterers. This dynamic information is linked with the local metabolic activity that drives these scatterers. Our technique can explore subcellular scales with micrometric resolution and dynamics ranging from the millisecond to seconds. By this mean we studied a wide range of tissues, animal and human in both normal and pathological conditions (cancer, ischemia, osmotic shock…) in different organs such as liver, kidney, and brain among others. Different cells, undetectable with FF-OCT, were identified (erythrocytes, hepatocytes…). Different scatterers clusters express different characteristic times and thus can be related to different mechanisms that we identify with metabolic functions. We are confident that the D-FFOCT, by accessing to a new spatiotemporal metabolic contrast, will be a leading technique on tissue imaging and for better medical diagnosis.

Cells shape or density is an important marker of tissues pathology. However, individual cells are difficult to observe in thick tissues frequently presenting highly scattering structures such as collagen fibers. Endogenous techniques struggle to image cells in these conditions. Moreover, exogenous contrast agents like dyes, fluorophores or nanoparticles cannot always be used, especially if non-invasive imaging is required. Scatterers motion happening down to the millisecond scale, much faster than the fix and highly scattering structures (global motion of the tissue), allowed us to develop a new approach based on the time dependence of the FF-OCT signals. This method reveals hidden cells after a spatiotemporal analysis based on singular value decomposition and wavelet analysis concepts. It does also give us access to local dynamics of imaged scatterers. This dynamic information is linked with the local metabolic activity that drives these scatterers. Our technique can explore subcellular scales with micrometric resolution and dynamics ranging from the millisecond to seconds. By this mean we studied a wide range of tissues, animal and human in both normal and pathological conditions (cancer, ischemia, osmotic shock…) in different organs such as liver, kidney, and brain among others. Different cells, undetectable with FF-OCT, were identified (erythrocytes, hepatocytes…). Different scatterer clusters express different characteristic times and thus can be related to different mechanisms that we identify with metabolic functions. We are confident that the D-FFOCT, by accessing to a new spatiotemporal metabolic contrast, will be a leading technique on tissue imaging and could lead to better medical diagnosis.

FF-OCT is a full field high transverse resolution version of temporal domain OCT. It acquires En-face images with an isotropic 3D submicronic resolution deep inside a biological tissue. It can access an optical contrast at a given depth, meaning that FF-OCT is sensitive to variations of optical index. FF-OCT can thus probe the microarchitecture of a tissue without label. However, Ff-OCT lacks of specific molecular contrast. On the contrary, Fluorescence microscopy can reveal labelled molecules with a very good specificity. Structured Illumination Microscopy (SIM) is a technique providing optical sectioning to fluorescence widefield microscopy. However, this technique can be complicated to implement in a tissue, and fails at providing environmental information. Therefore, combining FF-OCT and SIM has many advantages and adds a specific molecular contrast to a microarchitecture image of a biological sample. Combining FF-OCT and SIM has already been reported in the literature. Here, we report on the development of different way to combine FF-OCT and SIM. On the contrary to previously described setups, our setup enables the synchronous detection of both modalities. We believe this is important to access to dynamical events that take place in tissues. With such a technique, we are able to detect fast changes happening both in the environment, and in the behavior of a specific molecule. For now, we applied our technique to detect static structural information in the cornea. By the time of the conference, we expect to use our system to detect dynamical changes in a tissue.

The Full-field X-ray Imaging (FXI) beamline at the NSLS-II is designed for optimum performance of a transmission x-ray microscope (TXM). When complete, FXI will enable the TXM to obtain individual 2D projection images at 30 nm spatial resolution and up to 40 microns field of view (FOV) with exposure times of < 50 ms per image. A complete 3D nanotomography data set should take less than 1 minute. This will open opportunities for many real-time in-operando studies.

Publisher’s Note: This paper, originally published on 17 July 2015, was withdrawn per author request, if you have any questions please contact SPIE Digital Library Customer Service for assistance.

As EUV lithography moves toward high-volume manufacturing (HVM), a key need for the lithography materials makers is access to EUV photons and imaging. The SEMATECH Resist Materials Development Center (RMDC) provided a solution path by enabling the Resist and Materials companies to work together (using SUNY Polytechnic Institute’s Colleges of Nanoscale Science and Engineering (SUNY Poly CNSE) -based exposure systems), in a consortium fashion, in order to address the need for EUV photons. Thousands of wafers have been processed by the RMDC (leveraging the SUNY Poly CNSE/SEMATECH MET, SUNY Poly CNSE Alpha Demo Tool (ADT) and the SEMATECH Lawrence Berkeley MET) allowing many of the questions associated with EUV materials development to be answered. In this regard the activities associated with the RMDC are continuing. As the major Integrated Device Manufacturers (IDMs) have continued to purchase EUV scanners, Materials companies must now provide sc anner based test data that characterizes the lithography materials they are producing. SUNY Poly CNSE and SEMATECH have partnered to evolve the RMDC into “The Patterning Center of Excellence (CoE)”. The new CoE leverages the capability of the SUNY Poly CNSE-based full field ASML 3300 EUV scanner and combines that capability with EUV Microexposure (MET) systems resident in the SEMATECH RMDC to create an integrated lithography model which will allow materials companies to advance materials development in ways not previously possible. Keywords: EUV, Resist Materials Development, Full Field EUV exposure, Outgassing and Resist qualification testing. 1. Introduction Extreme ultraviolet (EUV) lithography has made a great deal of progress since the Micro Exposure Tools (MET) were introduced in the early 2000s. In the last several years, SEMATECH has been able to forge relationships with materials manufacturers whereby the METs have enabled amazing photoresist advancements thus lowering the impact of photoresist non-readiness on the list of EUV technology introduction inhibitors. Specifically, imaging material manufacturers have been

Full-field optical coherence tomography (FFOCT) quickly produces images that resemble conventional pathology images. We examined endometrium in an intra-operative like fashion (more than forty samples). FFOCT-imaged endometrium was recognizable to pathologists and compared favorably with microscopy of the same samples. Additional image enhancements and acquisition techniques were explored and may improve interpretation accuracy. Wider evaluation of images is ongoing, using more pathologist subjects. FFOCT may revolutionize pathology practice in the future by permitting rapid diagnosis and in vivo diagnosis; this is potentially a disruptive new diagnostic technique in pathology.

Full-Field OCT (FFOCT) produces optical slices of tissue using white light interferometry providing in-depth 2D images, with an isotropic resolution around 1 micrometer. These optical biopsy images are similar to those obtained with established histological procedures, but without tissue preparation and within few minutes. This technology could be useful when diagnosing a lesion or at the time of its surgical management. Here we evaluate the clinical value of FFOCT imaging in the management of patients with Head and Neck cancers by assessing the accuracy of the diagnosis done on FFOCT images from resected specimen. FFOCT images from Head and Neck samples were first compared to the gold standard (HES-conventional histology). An image atlas dedicated to the training of pathologists was built and diagnosis criteria were identified. Then, we performed a morphological correlative study: both healthy and cancerous samples from patients who undergo Head and Neck surgery of oral cavity, pharynx, and larynx were imaged. Images were interpreted in a random way by two pathologists and the FFOCT based diagnostics were compared with HES (gold standard) of the same samples. Here we present preliminary results showing that FFOCT provides a quick assessment of tissue architecture at microscopic level that could guide surgeons for tumor margin delineation during intraoperative procedure.

The emergence of freeform surfaces in optical systems creates a need for new methodologies. We present a new analysis tool to facilitate spectrometer designs that leverage freeform surfaces.

We proposed a cost-effective and full-field method for measuring vibration of loudspeaker using general industrial camera and fringe projection. The loudspeaker is excited by a sinusoidal signal. The fringe pattern is projected on the measured loudspeaker membrane that is dynamically deformed. Then the deformed fringes are captured by a camera. A trigger generation circuit is designed to control the camera. The Fourier Transform Profilometry (FTP) is adopted for 3D shape reconstruction. The validity of this method is approved by experiments. The cost of proposed measurement system is dramatically lower than that using high-speed camera.

Following the mature liquid crystals (LCs) display technology, there is a significant interest in implementing these devices into other non-display applications. Hence the emerging field of LC photonics is becoming increasingly active in which the strong electrooptic properties of LCs are harnessed for these applications particularly for imaging such as the use of SLMs, tunable focus lenses, tunable filters and polarization control devices. In this paper we review our recently developed LC devices integrated into full field optical coherence tomography system, into multi-spectral skin diagnosis system and in extended depth of focus imaging system.

Classical time-averaging and stroboscopic interferometry are widely used for MEMS/MOEMS dynamic behavior investigations. Unfortunately both methods require an amplitude magnitude of at least 0.19λ to be able to detect resonant frequency of the object. Moreover the precision of measurement is limited. That puts strong constrains on the type of element to be tested. In this paper the comparison of two methods of microobject vibration measurements that overcome aforementioned problems are presented. Both methods maintain high speed measurement time and extend the range of amplitudes to be measured (below 0.19λ), moreover can be easily applied to MEMS/MOEMS dynamic parameters measurements.