1. Échelle grating with improved polarization characteristics used for Earth observation
- Author
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Thomas Flügel-Paul, Frank Burmeister, Uwe D. Zeitner, Dirk Michaelis, Susann Sadlowski, Stefan Schwinde, and Torsten Harzendorf
- Subjects
Materials science ,Silicon ,business.industry ,Physics::Optics ,chemistry.chemical_element ,Grating ,Diffraction efficiency ,Isotropic etching ,Optics ,chemistry ,Crystalline silicon ,business ,Polarization (electrochemistry) ,Electron-beam lithography ,Echelle grating - Abstract
An Echelle-grating specifically developed for the space borne measurement of earth’s atmospheric CO2-concentration is presented. It has a line density of ~170L/mm and is manufactured on a thick crystalline silicon substrate using electron beam lithography. The echelle profile is realized using a highly anisotropic chemical etching process, which stops on the crystallographic planes of the crystal. The established manufacturing process allows perfect linear grating facets with negligible corner rounding of the profile. The important property of showing a low polarization sensitivity of the diffraction efficiency is achieved by a special design and technology for applying the gold coating of the grating which intentionally leaves one grating facet uncoated.
- Published
- 2020