5 results on '"Cunge, Gilles"'
Search Results
2. Cleaning chamber walls after ITO plasma etching process
3. Overview of several applications of chemical downstream etching (CDE) for IC manufacturing: advantages and drawbacks versus WET processes
4. Study of selective chemical downstream plasma etching of silicon nitride and silicon oxide for advanced patterning applications
5. Directed self-assembly of PS-b-PDMS into 193nm photoresist patterns and transfer into silicon by plasma etching
Catalog
Books, media, physical & digital resources
Discovery Service for Jio Institute Digital Library
For full access to our library's resources, please sign in.