5 results on '"Arps, Jennifer"'
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2. Standalone tools for actinic EUV pellicle qualification (Conference Presentation)
3. Actinic inband EUV reflectometry AIMER compared to ALS blank qualification and applied to structured masks
4. A tool for full area inband EUV transmission mapping of EUV pellicles
5. AIMER™: full reticle area, scanner-effective EUV mapping reflectometry
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