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In actual components, almost all creep failures occur at a stress concentrated parts. Therefore, the cavitation during creep in a notched bar was examined both by using FEM and actual testing on notched CrMoV-steel bar specimens, which were heat-treated in advance so as to get the creep-embrittlement in a rather short time. The change of creep voids in their number, distribution, orientation and coarescing direction in the notch root region was made clear by using SEM and an image processor. It was found that the cavitation behavior corresponded well with the creep damage based on the maximum principal stress.