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We design germanium-based higher-order topological cavities for terahertz applications by breaking the symmetry of a two-dimensional photonic crystal following the Su-Schrieffer-Heeger model. Calculations demonstrate the parity inversion of the electric field in differently deformed unit cells. The interface between domains of opposite topology presents edge and corner modes. The former are chiral, locking light propagation to its helicity. The latter prove that Ge-based structures can be used as high-order topological photonic crystals. These findings can accelerate the development of Si-photonic components working in a spectral range of high technological interest.