1. Microwave Volt–Impedance Spectroscopy of Semiconductors
- Author
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A. N. Reznik, N. V. Vostokov, V. I. Shashkin, and N. K. Vdovicheva
- Subjects
Materials science ,Semiconductor ,Physics and Astronomy (miscellaneous) ,Hall effect ,business.industry ,Electrical resistivity and conductivity ,Optoelectronics ,Wafer ,Antenna (radio) ,business ,Spectroscopy ,Volta potential ,Microwave - Abstract
The previously proposed technique of microwave volt–impedance spectroscopy of semiconductors has been experimentally verified. The technique allows one to determine the local values of electrical parameters of a semiconductor. The investigations have been carried out on a homogeneous single-crystal GaAs wafer with a system of concentric antennas formed on the top of it. The resolution is determined by the antenna central disk diameter, which has been 12, 27, and 57 μm. A dc bias voltage of 0 V ≤ U ≤ 5 V has been applied between antenna contact pads. The complex Z(f, U) impedance spectrum of each antenna has been measured on a Cascade Microtech probe station in the frequency range of f = 0.1–10 GHz. The electrical characteristics of the semiconductor have been determined from the Z(f, U) spectra by solving the inverse problem. The n-type of the semiconductor has been established, and the contact potential difference at the interface with a metal has been determined. The local values of electron density, mobility and electrical conductivity have been found have been found. The four-point probe Hall effect measurements of the surface-averaged values of the same parameters have shown good agreement of the results for the investigated homogeneous wafer.
- Published
- 2020
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