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Your search keyword '"Polysilicon -- Research"' showing total 1 results
Start Over Descriptor "Polysilicon -- Research" Publisher pennwell publishing corp.
1 results on '"Polysilicon -- Research"'

1. High-density plasma etching 0.35-um polysilicon gates

Author

Kraft, Robert and Prengle, Scott

Subjects
Plasma etching -- Research, Polysilicon -- Research
Abstract

This report describes the conditions needed to use a helicon high-density plasma etch tool for etching 0.35-[µmeter] polysilicon gates. This technology was used to establish the feasibility of simultaneously etching […]

Published
1995

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