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Start Over Author "Bartosh, Kyle" Publisher pennwell publishing corp.
1 results on '"Bartosh, Kyle"'

1. Eliminating carbon and watermarks during post-CMP cleaning

Author

Peters, Darryl W., Bartosh, Kyle, Naghshineh, Shahri, and Walker, Elizabeth

Subjects
Electronics industry, Electronic equipment and supplies -- Case studies, Electronics industry -- Case studies
Abstract

OVERVIEW The use of organosilicate glass (OSG) as a low-k dielectric in copper interconnects creates challenges in cleaning wafers after they have been through chemical mechanical planarization (CMP). The high […]

Published
2004

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