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1. Integrated Optical Switch Controlled with a MEMS Rotational Electrostatic Actuator

Author

Martin Berard, Jonathan Briere, Hadi Rabbani-Haghighi, Michael Menard, Mohannad Y. Elsayed, Frederic Nabki, Menouer Saidani, and Francois Menard

Subjects
Microelectromechanical systems, Materials science, business.industry, Electrostatic actuator, Optical switch, Deformable mirror, Printed circuit board, chemistry.chemical_compound, Silicon nitride, chemistry, Insertion loss, Optoelectronics, business, Voltage
Abstract

We demonstrate the first optical switch based on a rotating microelectromechanical device integrated with silicon nitride waveguides. This prototype has less than 15 dB of total insertion loss and requires actuation voltages below 120 V.

Published
2017
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