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26 results on '"Tennant, D. A."'

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1. X-ray microscopy: new capabilities and short pulse possibilities

3. Fabrication of MOS devices with extreme ultraviolet lithography

7. 10x Reduction Imaging at 13.4 nm

8. At-Wavelength Metrology of EUV Cameras using Lateral-Shearing Interferometry

9. EUV Metrology of Multilayer Optics

11. A 10× Schwarzschild system for soft-x-ray projection lithography

12. Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography

13. Simulation of Soft-X-Ray Images from a 1:1 Ring-Field Optic

15. Soft-X-ray Projection Lithography Experiments using Schwarzschild Imaging Optics

16. Soft-X-Ray Projection Imaging Using a 1:1 Ring-Field Optic

18. High-resolution soft-x-ray projection imaging using Schwarzschild optics and a laser plasma source

20. Projection lithography using soft x-rays

21. High Resolution Soft-X-Ray Projection Imaging

22. Soft X-ray Projection Imaging Using a Laser Plasma Source

23. Achieving Uniform Multilayer Coatings on Figured Optics

24. High Resolution Soft-X-Ray Projection Imaging

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