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The periodic structure on the optical surface affects the beam shape and its propagation. As the size of the optical elements becomes larger and its shape becomes complicated, the quantitative analysis of the effect of the periodic structure on the optical surface becomes indispensable given that it is very difficult to completely eliminate the microscopic periodic structures. Herein, we have experimentally investigated Bragg scattering from an optical surface with extremely small aspect ratios (~10 -5 ) and groove densities (0.5 lines/mm). We observed the period of the constructive interference formed due to the propagation of the 0th, 1st, and -1st beam modes caused by Bragg scattering. When the periodic structure has a modulation depth of ± 50 nm, the intensity increase of constructive interference between the beam modes formed by Bragg scattering was > 10 times greater than the intensity of a flat surface at the propagation distance at which constructive interference was most pronounced. This study is envisaged to open new avenues for the quantification of the effect of periodic structures based on the observation of the interference on the beam profile formed by Bragg scattering during the beam propagation.

Thermoreflectance microscopy is essential in understanding the unpredictable local heating generation that occurs during microelectronic device operation. However, temperature measurements of multi-layered semiconductor devices represent a challenge because the thermoreflectance coefficient is quite small and is dramatically changed by the optical interference inside transparent layers of the device. Therefore, we propose a spectroscopic thermoreflectance microscopy system using a systematic approach for improving the quantitative temperature measurement of multi-layered semiconductor devices. We demonstrate the quantitative measurement of the temperature profile for physical defects on thin-film polycrystalline silicon resistors via thermoreflectance coefficient calibration and effective coefficient κ estimation.

We demonstrate simultaneous imaging of multiple fluorophores using wide-field epi-fluorescence microscopy with a monochrome camera. The intensities of the three lasers are modulated by a sinusoidal waveform in order to excite each fluorophore with the same modulation frequency and a different time-delay. Then, the modulated fluorescence emissions are simultaneously detected by a camera operating at four times the excitation frequency. We show that two different fluorescence beads having crosstalk can be clearly separated using digital processing based on the phase information. In addition, multiple organelles within multi-stained single cells are shown with the phase mapping method, demonstrating an improved dynamic range and contrast compared to the conventional fluorescence image. These findings suggest that wide-field epi-fluorescence microscopy with four-bucket detection could be utilized for high-contrast multicolor imaging applications such as drug delivery and fluorescence in situ hybridization.

We report a technique for rapidly mapping absorbing defects in optical materials, which act as laser-induced damage precursors, based on full-field photothermal reflectance microscopy. An intensity-modulated pump beam heats absorbing defects in the optical sample, creating localized, modulated refractive-index variations around the defects. A probe beam then illuminates the defect sites, and the measured amplitude of the reflectance variation is used to map the distribution of defects in the medium. Measurements show that this method offers a faster defect mapping speed of about 0.03 mm(2) per minute and a detectivity of a few tens of nanometers comparable to that of conventional scanning photothermal deflection microscopy.

We present a Fourier-domain filtering method for charge-coupled device (CCD)-based thermoreflectance microscopy to improve the thermal imaging speed while maintaining high thermal sensitivity. The time-varying reflected light distribution from the surface of bias-modulated microresistor was recorded by a CCD camera in free-run mode and converted to the frequency domain using the fast Fourier transform (FFT) for all pixels of the CCD. After frequency peak filtering followed by inverse FFT, a thermoreflectance image was obtained. The imaging results of the proposed method were quantitatively compared with those of the conventional four-bucket method, showing that the Fourier-domain filtering method can provide thermal imaging 24-42 times faster than the four-bucket method, depending on the required thermal sensitivity.

We propose and demonstrate a compact microlensed dual-fiber probe that has a good collection efficiency and a high depth-resolution ability for fluorescence measurements. The probe is formed with a conventional fusion splicer creating a common focusing lens on two fibers placed side by side. The collection efficiency of the fabricated probe was evaluated by measuring the fluorescence signal of a fresh ginkgo leaf. It was shown experimentally that the proposed probe could effectively collect the fluorescence signal with a six-fold increase compared to that of a general flat-tipped probe. The beam propagation method was used to design a probe with an optimized working distance and an improved resolving depth. It was found that the working distance depends mainly on the radius of curvature of the lens, whereas the resolving depth is determined by the core diameters of the illumination and collection fibers. The depth-resolved ability of probes with working distances of ~100 μm and 300 μm was validated by using a two-layer tissue phantom. The experimental results demonstrate that the microlensed dual-fiber probe has the potential to facilitate depth-resolved fluorescence detection of epithelial tissue.