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1. Investigation of Heater Structures for Thermal Conductivity Measurements of SiO2 and Al2O3 Thin Films Using the 3-Omega Method

Author

Fabian Kühnel, Christoph Metzke, Jonas Weber, Josef Schätz, Georg S. Duesberg, and Günther Benstetter

Subjects
General Chemical Engineering, ddc:540, General Materials Science, 3-Omega method, 3ω, heater geometry, heater dimensions, thermal conductivity, silicon dioxide (SiO2), aluminum oxide (Al2O3), annealing process
Abstract

Nanomaterials : open access journal 12(11), 1928 (2022). doi:10.3390/nano12111928, Published by MDPI, Basel

Published
2022
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