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Fraunhofer EMFT’s research and manufacturing portfolio includes piezoelectrically actuated silicon micro diaphragm pumps with passive flap valves. Research and development in the field of microfluidics have been dedicated for many years to the use of micropumps for generating positive and negative pressures, as well as delivering various media. However, for some applications, only small amounts of fluid need to be pumped, compressed, or evacuated, and until now, only macroscopic pumps with high power consumption have been able to achieve the necessary flow rate and pressure, especially for compressible media such as air. To address these requirements, one potential approach is to use a multistage of high-performing micropumps optimized to negative pressure. In this paper, we present several possible ways to cascade piezoelectric silicon micropumps with passive flap valves to achieve these stringent requirements. Initially, simulations are conducted to generate negative pressures with different cascading methods. The first multistage option assumes pressure equalization over the piezo-actuator by the upstream pump, while for the second case, the actuator diaphragm operates against atmospheric pressure. Subsequently, measurement results for the generation of negative gas pressures down to −82.1 kPa relative to atmospheric pressure (19.2 kPa absolute) with a multistage of three micropumps are presented. This research enables further miniaturization of many applications with high-performance requirements for micropumps, achievable with these multistage systems.

Subcutaneous injection is crucial for the treatment of many diseases. Especially for regular or continuous injections, automated dosing is beneficial. However, existing devices are large, uncomfortable, visible under clothing, or interfere with physical activity. Thus, the development of small, energy efficient and reliable patch pumps or implantable systems is necessary and research on microelectromechanical system (MEMS) based drug delivery devices has gained increasing interest. However, the requirements of medical applications are challenging and especially the dosing precision and reliability of MEMS pumps are not yet sufficiently evaluated. To enable further miniaturization, we propose a precise 5 × 5 mm2 silicon micropump. Detailed experimental evaluation of ten pumps proves a backpressure capability with air of 12.5 ± 0.8 kPa, which indicates the ability to transport bubbles. The maximal water flow rate is 74 ± 6 µL/min and the pumps’ average blocking pressure is 51 kPa. The evaluation of the dosing precision for bolus deliveries with water and insulin shows a high repeatability of dosed package volumes. The pumps show a mean standard deviation of only 0.02 mg for 0.5 mg packages, and therefore, stay below the generally accepted 5% deviation, even for this extremely small amount. The high precision enables the combination with higher concentrated medication and is the foundation for the development of an extremely miniaturized patch pump.