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The extreme ultraviolet (EUV) photolithography process is a cornerstone of semiconductor manufacturing and operates under demanding precision standards realized via nanometer-level overlay (OVL) error modeling. This procedure allows the machine to anticipate and correct OVL errors before impacting the wafer, thereby facilitating near-optimal image exposure while simultaneously minimizing the overall OVL error. Such models are usually high dimensional and exhibit rigorous statistical phenomena such as collinearities that play a crucial role in the process of tuning their parameters. Ordinary least squares (OLS) is the most widely used method for parameters tuning of overlay models, but in most cases it fails to compensate for such phenomena. In this paper, we propose the usage of ridge regression, a widely known machine learning (ML) algorithm especially suitable for datasets that exhibit high multicollinearity. The proposed method was applied in perturbed data from a 300 mm wafer fab, and the results show reduced residuals when ridge regression is applied instead of OLS. [ABSTRACT FROM AUTHOR]

Multiple-point geostatistics (MPS) is an established tool for the uncertainty quantification of Earth systems modeling, particularly when dealing with the complexity and heterogeneity of geological data. This study presents a novel pixel-based MPS method for modeling spatial data using advanced machine-learning algorithms. Pixel-based multiple-point simulation implies the sequential modeling of individual points on the simulation grid, one at a time, by borrowing spatial information from the training image and honoring the conditioning data points. The developed methodology is based on the mapping of the training image patterns database using the t-Distributed Stochastic Neighbor Embedding (t-SNE) algorithm for dimensionality reduction, and the clustering of patterns by applying the Density-based Spatial Clustering of Applications with Noise (DBSCAN) algorithm, as an efficient unsupervised classification technique. For the automation, optimization, and input parameter tuning, multiple stages are implemented, including entropy-based determination of the template size and a k-nearest neighbors search for clustering parameter selection, to ensure the proposed method does not require the user's interference. The proposed model is validated using synthetic two- and three-dimensional datasets, both for conditional and unconditional simulations, and runtime information is provided. Finally, the method is applied to a case study gold mine for stochastic orebody modeling. To demonstrate the computational efficiency and accuracy of the proposed method, a two-dimensional training image with 101 by 101 pixels is simulated for 100 conditional realizations in 453 s (~4.5 s per realization) using only 361 hard data points (~3.5% of the simulation grid), and the resulting average simulation has a good visual match and only an 11.8% pixel-wise mismatch with the training image. [ABSTRACT FROM AUTHOR]

The continuous penetration of renewable energy resources (RES) into the energy mix and the transition of the traditional electric grid towards a more intelligent, flexible and interactive system, has brought electrical load forecasting to the foreground of smart grid planning and operation. Predicting the electric load is a challenging task due to its high volatility and uncertainty, either when it refers to the distribution system or to a single household. In this paper, a novel methodology is introduced which leverages the advantages of the state-of-the-art deep learning algorithms and specifically the Convolution Neural Nets (CNN). The main feature of the proposed methodology is the exploitation of the statistical properties of each time series dataset, so as to optimize the hyper-parameters of the neural network and in addition transform the given dataset into a form that allows maximum exploitation of the CNN algorithm's advantages. The proposed algorithm is compared with the LSTM (Long Short Term Memory) technique which is the state of the art solution for electric load forecasting. The evaluation of the algorithms was conducted by employing three open-source, publicly available datasets. The experimental results show strong evidence of the effectiveness of the proposed methodology. [ABSTRACT FROM AUTHOR]