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RuO2 thin films were prepared using magnetron sputtering under different deposition conditions, including direct current (DC) and radio frequency (RF) discharges, metallic/oxide cathodes, different substrate temperatures, pressures, and deposition times. The surface morphology, residual stress, composition, crystal structure, mechanical properties, and pH performances of these RuO2 thin films were investigated. The RuO2 thin films RF sputtered from a metallic cathode at 250 °C exhibited good pH sensitivity of 56.35 mV/pH. However, these films were rougher, less dense, and relatively softer. However, the DC sputtered RuO2 thin film prepared from an oxide cathode at 250 °C exhibited a pH sensitivity of 57.37 mV/pH with a smoother surface, denser microstructure and higher hardness. The thin film RF sputtered from the metallic cathode exhibited better pH response than those RF sputtered from the oxide cathode due to the higher percentage of the RuO3 phase present in this film. [ABSTRACT FROM AUTHOR]

The utilization of vertical graphene nanosheet (VGN) electrodes for energy storage in supercapacitors has long been desired yet remains challenging, mostly because of insufficient control of nanosheet stacking, density, surface functionality, and reactivity. Here, we report a single-step, scalable, and environment-friendly plasma-assisted process for the fabrication of densely packed yet accessible surfaces of forested VGNs (F-VGNs) using coconut oil as precursor. The morphology of F-VGNs could be controlled from a continuous thick structure to a hierarchical, cauliflower-like structure that was accessible by the electrolyte ions. The surface of individual F-VGNs was slightly oxygenated, while their interior remained oxygen-free. The fabricated thick (>10 μm) F-VGN electrodes presented specific capacitance up to 312 F/g at a voltage scan rate of 10 mV/s and 148 F/g at 500 mV/s with >99% retention after 1000 cycles. This versatile approach suggests realistic opportunities for further improvements, potentially leading to the integration of F-VGN electrodes in next-generation energy storage devices. [ABSTRACT FROM AUTHOR]