1. Effect of Annealing Temperature on the Structure and Properties of La 2 O 3 High-K Gate Dielectric Films Prepared by the Sol-Gel Method.
- Author
-
Lu, Zhenchuan, Tuokedaerhan, Kamale, Cai, Haotian, Du, Hongguo, and Zhang, Renjia
- Subjects
SOL-gel processes ,TEMPERATURE effect ,THIN films ,ATOMIC force microscopy ,SCANNING electron microscopy ,DIELECTRIC films - Abstract
This article presents the sol-gel method for depositing La
2 O3 thin films on n-type Si substrates and quartz substrates, and investigates the impact of annealing temperature on the microcomposition, surface morphology, optical properties, and band characteristics of the films. X-ray diffraction (XRD) analysis indicates that the films are amorphous below 500 °C, with annealing resulting in a hexagonal-phase La2 O3 (h-a2 O3 ) and new non-hydrated impurities. Fourier-transform infrared (FTIR) analysis reveals that the prepared La2 O3 film is unaffected by moisture. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) provide evidence that the La2 O3 film has a smooth, uniform surface without cracks. The roughness increases from 0.426 nm to 1.200 nm, and the film thins from 54.85 nm to 49.80 nm as the annealing temperature rises. The film's transmittance is above 75%, as measured by UV-Vis, and the calculated optical bandgap increases from 5.11 eV to 5.75 eV. The calculated band offset of the La2 O3 film is greater than 1 eV, which meets the minimum requirements for MOS devices, thus providing promising prospects for La2 O3 films in MOS applications. [ABSTRACT FROM AUTHOR]- Published
- 2023
- Full Text
- View/download PDF