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Start Over Author "Eiji Hirota" Publisher laser society of japan
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1. Measurements of non-emissive radicals in silane plasma using laser absorption spectroscopy

Author

Toshio Goto and Eiji Hirota

Subjects
Tunable diode laser absorption spectroscopy, Materials science, Absorption spectroscopy, Infrared, Radical, Analytical chemistry, Physics::Optics, Plasma, Laser, Silane, law.invention, chemistry.chemical_compound, chemistry, law, Physics::Chemical Physics, Diode
Abstract

Laser absorption spectroscopy is suitable for the direct determination of the absolute values of non-emissive radical densities. Using frequency-variable infrared diode lasers, we have measured for the first time the SiH3 radical density in silane plasma. This paper reviews the recent progress in the measurements of neutral non-emissive radicals SiHm (m=0-3) in silane plasma by laser absorption spectroscopy.

Published
1989
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