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Pd77Cu6Si17 thin film metallic glasses of which thicknesses were 10, 20 and 28 µm were bent by laser forming. The working conditions were changed and crystallization of thin films was investigated. When the laser power was changed under fixing the scanning velocity to 40 mm/s and the Q-switch frequency to 3 kHz, crystallization was observed at laser irradiated surface and/or the reverse side to the laser irradiation. In a case of changing the scanning velocity under fixing the Q-switch frequency to 3 kHz and the laser power to 2.0 W for the film thickness of 20 µm and 3.0 W for the film thickness of 28 µm, the working conditions without crystallization were found at high scanning velocity. When the Q-switch frequency was changed under fixing the scanning velocity to 40 mm/s and the laser power to 2.0 W for the film thickness of 20 µm and 3.0 W for the film thickness of 28 µm, the working conditions without crystallization were found at low Q-switch frequency.

Palladium based thin film metallic glasses were plastically bent by laser forming process. Thin films of Pd77Cu6Si17 with a thickness of 0.028mm and Pd40Ni40P20 with a thickness of 0.017mm were used for specimen. A 50W YAG laser was employed for forming. Variation of bending angle was investigated by changing working conditions such as laser power, laser operation mode (continuous wave and Q-switch pulsed modes), Q-sw frequency, scanning velocity and scanning number. From the experimental results, both thin films of Pd77Cu6Si17 and Pd40Ni40P20 were successfully bent for more than 85o. The formed thin films did not crystallize but were amorphous. As scanning number increased, bending angle also increased but increasing rate decreased. When laser power and scanning velocity were changed, bending angle had a peak. When Q-sw frequency was changed, bending angle had a broad peak in Pd77Cu6Si17 case, but that was larger as frequency was smaller in Pd40Ni40P20 case.