1. Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams
- Author
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Shuai Maobing, Xiong Zhonghua, Jin-Wen Zhang, Xiaodong Wang, Ji Wen, Hong-Rui Liu, Zhaohong Mo, and Hongjun Zhang
- Subjects
Superconductivity ,Surface micromachining ,Fabrication ,Materials science ,business.industry ,Bilayer ,Transition temperature ,Surface roughness ,General Physics and Astronomy ,Optoelectronics ,Substrate (electronics) ,Deformation (meteorology) ,business - Abstract
For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I–V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I–V characteristics of the devices. For devices with the Ti/Au bilayer (150 – m × 150 μm) and beams (100 μ m × 25 μm), the transition temperature (T c) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity α is 95.1.
- Published
- 2021