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This paper presents an optical diagnostic examination of dc planar magnetron discharge used for titanium deposition at 30 mTorr in argon bulk gas. The results were obtained by optical absorption (OAS) and emission (OES) spectroscopy for two distances from the target without substrate. The absolute density of titanium in the ground and metastable states at 4 cm from the target ranged, respectively, between 8 × 1010 cm−3 and 1012 cm−3 and between 6 × 1010 cm−3 and 3 × 1011 cm−3, in the range 0.2–1.0 A. OES results were used to prepare an assumed interpretation in terms of differences in loss mechanisms, mainly by either diffusion towards the walls for all particles at 8 cm from the target or collision losses for non-radiative species at 4 cm from the target, except for the titanium ground state. This was confirmed by our results of the argon metastable density measurement at 4 cm which was constant at around 7 × 1010 cm−3 with discharge current.

The quality of pentacene films in pentacene-based devices significantly affects their performance. In this report, the effects of various defects in graphene on a pentacene film were studied with scanning tunneling microscopy. The two most common defects found in the epitaxial graphene grown on SiC(0 0 0 1) substrates were subsurface carbon nanotube (CNT) defects and step edges. The most significant perturbation of the pentacene films was induced by step edges between single-layer and bilayer graphene domains, while the effect of step edges between single-layer domains was marginal. The subsurface CNT defects slightly distorted the structure of the single-layer pentacene, but the influence of such defects decreased as the thickness of the pentacene film increased. These results suggest that the uniformity of the graphene layer is the most important parameter in the growth of high-quality pentacene films on graphene.