1. Annealing Effect on Sputtered CoCr Films
- Author
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Hiroshi Sato, Yoichi Uchiyama, Uee-Myung Hwang, Kazuo Ishibashi, and Toshifumi Ueda
- Subjects
Materials science ,Condensed matter physics ,Annealing (metallurgy) ,General Engineering ,General Physics and Astronomy ,Coercivity ,Condensed Matter::Materials Science ,Crystallinity ,Magnetic anisotropy ,Nuclear magnetic resonance ,Structural change ,Lattice (order) ,Metastability ,Binary system - Abstract
Changes in structure of sputter-deposited CoCr films are discussed in conjunction with those in magnetic properties by means of annealing. At an annealing temperature of 400°C, drastic changes are observed with respect to crystallinity, saturation magnetization, and perpendicular anisotropy. Then at an annealing temperature of 480°C, the film structure becomes homogeneous. Furthermore, the films made especially at a high substrate temperature of 220°C are suggested to be composed of at least two regions with different lattice coherency along the film thickness; such a structure contributes to a large value of the perpendicular coercivity and, together with segregation, to the perpendicular anisotropy.
- Published
- 1990
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