1. Integrated high-voltage modulator for plasma immersion ion implantation with an RF plasma
- Author
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E Richter, W Möller, A I Rogozin, and V T Astrelin
- Subjects
Ion implantation ,Chemistry ,business.industry ,Optoelectronics ,High voltage ,Electron ,Plasma ,Atomic physics ,Condensed Matter Physics ,business ,Plasma-immersion ion implantation ,Ion - Abstract
The present investigation focuses on further development of the plasma based high-voltage modulator for plasma immersion ion implantation devices. The modulator produces high-voltage pulses using grid controlled extraction of electrons from the plasma, which is used for the ion implantation. The operation features of the modulator in connection with a radio-frequency plasma are described. The device is applied to nitrogen ion implantations of stainless steel. The results indicate considerable hardness improvement, which confirms the practical utility of the high-voltage modulator.
- Published
- 2003
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