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Here, the ability of using p-type tin oxide (SnOx) thin films as a thermal sensor has been investigated. Firstly, the thermoelectric performance was optimized by controlling the thickness of the SnOx film from 60 up to 160 nm. A high Seebeck coefficient of +263 μV K−1 and electrical conductivity of 4.1 × 102 (S m−1) were achieved in a 60 nm thick SnOx film, due to a compact nanostructured film and the absence of the Sn metallic phase, which was observed for the thicker SnOx film leading to a typical thermoelectric transport properties of a n-type Sn film. Moreover, x-ray photoelectron spectroscopy revealed the co-existence of SnO (79.7%) and SnO2 (20.3%) phases in the 60 nm thick SnOx film, while the optical measurements revealed an indirect gap of 1.8 eV and a direct gap of 2.7 eV, respectively. The 60 nm-SnOx thin film have been tested as a thermoelectric touch sensor, achieving a Vsignal/Vnoise ≈ 20, with a rise time <1 s. Therefore, this work provides an efficient way for developing highly efficient thermal sensors with potential use in display technologies. [ABSTRACT FROM AUTHOR]

Electrochemical stability, moderate ionic conductivity and low electronic conductivity make the lithium phosphorous oxynitride (LiPON) electrolyte suitable for micro and nanoscale lithium batteries. The electrical and electrochemical properties of thin-film electrolytes can seriously compromise full battery performance. Here, radio-frequency (RF)-sputtered LiPON thin films were fabricated in nitrogen plasma under different working pressure conditions. With a slight decrease in the deposition pressure from 6 to 1  ×  10−3 mbar, the 600 nm thick LiPON film reveals an electric resistivity increase from 108 to 1010 Ω · cm, respectively. UV– micro-Raman spectroscopy confirms the nitrogen incorporation on the Li3PO4 material, while scanning electron microscopy, Rutherford backscattering spectrometry and nuclear reaction analysis show a well-defined compact structure with a composition of Li2.2PO2.2N0.6 for the higher electrical-resistivity film. An ionic conductivity close to 3  ×  10−7 S cm−1 at room temperature (22 °C) was measured by AC impedance spectroscopy. Thermal properties were investigated through the differential scanning calorimetry technique. LiPON films reveal high optical transmission (>75%) in the UV–vis range, which could be interesting for transparent electronic devices. [ABSTRACT FROM AUTHOR]

This paper presents an innovative approach to measure the pressure patterns associated with the motility and peristaltic movements in the upper gastrointestinal tract. This approach is based on inexpensive and easy to fabricate thin-film aluminum strain gauge pressure sensors using a flexible polyimide film (Kapton) as substrate and SU-8 structural support. These sensors are fabricated using well-established and standard photolithographic and wet etching techniques. Each sensor has a 3.4 mm2 area, allowing a fabrication process with a high level of sensors integration (four sensors in 1.7 cm), which is suitable for placing them in a single catheter. These strain gauges bend when pressure is applied and, consequently, their electrical resistance is changed. The fabricated sensors feature an almost linear response (R2  =  0.9945) and an overall sensitivity of 6.4 mV mmHg−1. Their readout and control electronics were developed in a flexible Kapton ribbon cable and, together with the sensors, bonded and wrapped around a catheter-like structure. The sequential acquisition of the different signals is carried by a microcontroller with a 10 bit ADC at a sample rate of 250 Hz per−1 sensor. The signals are presented in a user friendly interface developed using the integrated development environment software, QtCreator IDE, for better visualization by physicians. [ABSTRACT FROM AUTHOR]

The application of micro electromechanical systems (MEMS) technology in several consumer electronics leads to the development of micro/nano power sources with high power and MEMS integration possibility. This work presents the fabrication of a flexible solid-state Li-ion battery (LIB) (~2.1 μm thick) with a design towards electrodes electrical insulation, using conventional, low cost and compatible MEMS fabrication processes. Kapton® substrate provides flexibility to the battery. E-beam deposited 300 nm thick Ge anode was coupled with LiCoO2/LiPON (cathode/solid-state electrolyte) in a battery system. LiCoO2 and LiPON films were deposited by RF-sputtering with a power source of 120 W and 100 W, respectively. LiCoO2 film was annealed at 400 °C after deposition. The new design includes Si3N4 and LiPO thin-films, providing electrode electrical insulation and a battery chemical stability safeguard, respectively. Microstructure and battery performance were investigated by scanning electron microscopy, electric resistivity and electrochemical measurements (open circuit potential, charge/discharge cycles and electrochemical impedance spectroscopy). A rechargeable thin-film and lightweight flexible LIB using MEMS processing compatible materials and techniques is reported. [ABSTRACT FROM AUTHOR]

A multilayer physical vapour deposition (PVD) thin-film encapsulation method for lithium microbatteries is presented. Lithium microbatteries with a lithium cobalt oxide (LiCoO2) cathode, a lithium phosphorous oxynitride (LiPON) electrolyte and a metallic lithium anode are under development, using PVD deposition techniques. Metallic lithium film is still the most common anode on this battery technology; however, it presents a huge challenge in terms of material encapsulation (lithium reacts with almost any materials deposited on top and almost instantly begins oxidizing in contact with atmosphere). To prove the encapsulation concept and perform all the experiments, lithium films were deposited by thermal evaporation technique on top of a glass substrate, with previously patterned Al/Ti contacts. Three distinct materials, in a multilayer combination, were tested to prevent lithium from reacting with protection materials and atmosphere. These multilayer films were deposited by RF sputtering and were composed of lithium phosphorous oxide (LiPO), LiPON and silicon nitride (Si3N4). To complete the long-term encapsulation after breaking the vacuum, an epoxy was applied on top of the PVD multilayer. In order to evaluate oxidation state of lithium films, the lithium resistance was measured in a four probe setup (cancelling wires/contact resistances) and resistivity calculated, considering physical dimensions. A lithium resistivity of 0.16 Ω μm was maintained for more than a week. This PVD multilayer exonerates the use of chemical vapour deposition (CVD), glove-box chambers and sample manipulation between them, significantly reducing the fabrication cost, since battery and its encapsulation are fabricated in the same PVD chamber. [ABSTRACT FROM AUTHOR]

This paper reports on an innovative approach to measuring intraluminal pressure in the upper gastrointestinal (GI) tract, especially monitoring GI motility and peristaltic movements. The proposed approach relies on thin-film aluminum strain gauges deposited on top of a Kapton membrane, which in turn lies on top of an SU-8 diaphragm-like structure. This structure enables the Kapton membrane to bend when pressure is applied, thereby affecting the strain gauges and effectively changing their electrical resistance. The sensor, with an area of 3.4 mm2, is fabricated using photolithography and standard microfabrication techniques (wet etching). It features a linear response (R2 = 0.9987) and an overall sensitivity of 2.6 mV mmHg−1. Additionally, its topology allows a high integration capability. The strain gauges’ responses to pressure were studied and the fabrication process optimized to achieve high sensitivity, linearity, and reproducibility. The sequential acquisition of the different signals is carried out by a microcontroller, with a 10-bit ADC and a sample rate of 250 Hz. The pressure signals are then presented in a user-friendly interface, developed using the Integrated Development Environment software, QtCreator IDE, for better visualization by physicians. [ABSTRACT FROM AUTHOR]