1. Controlled orientation of molecular-beam-epitaxial BaTiO3on Si(001) using thickness engineering of BaTiO3and SrTiO3buffer layers
- Author
-
María Vila, Olivier Richard, Joris Van Campenhout, Juan Rubio-Zuazo, Germán R. Castro, Hugo Bender, Clement Merckling, Johan Meersschaut, Dries Van Thourhout, Thierry Conard, Min-Hsiang Mark Hsu, Philippe Absil, Paola Favia, Marianna Pantouvaki, and Rosalía Cid
- Subjects
010302 applied physics ,Materials science ,Silicon ,business.industry ,General Engineering ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Epitaxy ,01 natural sciences ,Buffer (optical fiber) ,chemistry ,0103 physical sciences ,Optoelectronics ,Photonics ,Thin film ,0210 nano-technology ,business ,Molecular beam ,Layer (electronics) ,Molecular beam epitaxy - Abstract
Monolithically integrating BaTiO3 on silicon substrates has attracted attention because of the wide spectrum of potential novel applications ranging from electronics to photonics. For optimal device performance, it is important to control the BaTiO3 domain orientation during thin film preparation. Here, we use molecular beam epitaxy to prepare crystalline BaTiO3 on Si(001) substrates using a SrTiO3 buffer layer. A systematic investigation is performed to understand how to control the BaTiO3 domain orientation through the thickness engineering of the SrTiO3 buffer layer and the BaTiO3 layer itself. This provides different possibilities for obtaining a given BaTiO3 orientation as desired for a specific device application.
- Published
- 2017
- Full Text
- View/download PDF