1. Self-Assembledc-Plane GaN Nanopillars on γ-LiAlO2Substrate Grown by Plasma-Assisted Molecular-Beam Epitaxy
- Author
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Ming-Hong Gau, Ming-Chi Chou, Meng-Wei Sham, Jih-Chen Chiang, Yen-Liang Chen, Chia-Ho Hsieh, Ikai Lo, Jenn-Kai Tsai, Yu-Chi Hsu, Wen-Yuan Pang, and Yao-I Chang
- Subjects
Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,General Engineering ,Nucleation ,General Physics and Astronomy ,Plasma ,Substrate (electronics) ,Epitaxy ,Transmission electron microscopy ,Optoelectronics ,Dislocation ,business ,Molecular beam epitaxy ,Nanopillar - Abstract
We have grown M-plane GaN films with self-assembled C-plane GaN nanopillars on a γ-LiAlO2 substrate by plasma-assisted molecular-beam epitaxy. The diameters of the basal plane of the nanopillars are about 200 to 900 nm and the height is up to 600 nm. The formation of self-assembled c-plane GaN nanopillars is through nucleation on hexagonal anionic bases of γ-LiAlO2. Dislocation defects were observed and analyzed by transmission electron microscopy. From the experimental results, we developed a mechanism underlying the simultaneous growth of three-dimensional c-plane nanopillars and two-dimensional M-plane films on a γ-LiAlO2 substrate.
- Published
- 2008
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