1. Ga2O3 metal–insulator-semiconductor solar-blind photodiodes with plasmon-enhanced responsivity and suppressed internal photoemission.
- Author
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Zhang, Chong-De, Ren, Fang-Fang, Yu, Mingbin, Zhang, Baoshan, Gu, Shulin, Zhang, Rong, Zheng, Youdou, and Ye, Jiandong
- Subjects
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METAL insulator semiconductors , *POLARITONS , *PHOTODIODES , *SURFACE plasmon resonance , *HOT carriers , *PHOTOCATHODES , *PHOTOEMISSION - Abstract
Metal-semiconductor-metal (MSM) architectures are popular for achieving high-responsivity Ga2O3 solar-blind photodetectors (SBPDs), however, the hot-electron-induced internal photoemission (IPE) effect restricts their detecting performance. Herein, we demonstrate the rational design of an Al/Al2O3/Ga2O3 metal–insulator-semiconductor (MIS) SBPD that has merits of enhanced responsivity, suppressed sub-gap response and ultralow dark current based on the simulation results obtained using Lumerical software. For the cylindrical patterned detectors with Al/Al2O3/Ga2O3 MIS structures, the optimized dimensions of Al electrodes with a conformed ultra-thin (2 nm) Al2O3 layer support the surface plasmon polariton resonances at 250 nm, thus improving the photoresponsivity to 74 mA W−1. Furthermore, the sandwiched Al2O3 layer lifts the barrier for hot electrons in electrodes, which significantly suppresses the IPE-induced sub-gap photoresponse by more than 105 in magnitude with respect to the Al/Ga2O3 MSM counterpart. Optical and electrical field distributions are overlapped in cylindrically patterned MIS detectors, simultaneously improving the excitation and collection efficiencies of excess carriers and resulting in the 103-boosted rejection ratio. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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