1. Random polarization distribution of multi-domain model for polycrystalline ferroelectric HfZrO2
- Author
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C.-Y. Liao, Shu-Tong Chang, Shih-Hung Chiang, Hong Liang, Jen-Hao Liu, Kuan-Ting Chen, Fu-Jhu Hsieh, Min-Hung Lee, Kai-Shin Li, K.-Y. Hsiang, and Shao-Hua Chang
- Subjects
010302 applied physics ,Materials science ,Computer simulation ,Condensed matter physics ,Gaussian ,Transistor ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Polarization (waves) ,01 natural sciences ,Ferroelectricity ,Electronic, Optical and Magnetic Materials ,law.invention ,symbols.namesake ,Planar ,law ,0103 physical sciences ,Materials Chemistry ,symbols ,Electrical and Electronic Engineering ,0210 nano-technology ,Scaling ,Negative impedance converter - Abstract
Device dimension scaling down to be comparable to the domain size of polycrystalline ferroelectric HfZrO2 (HZO) is evaluated for subthreshold swing (SS) and drain-induced barrier lowering (DIBL) by numerical simulation. The proposed multi-domain modeling involves polarization random location in HZO and probability with Gaussian distribution, as well as being integrated with the Landau–Khalatnikov equation. A small device with a few domains exhibits steep SS compared with large dimension with many domains. The N-DIBL (negative-DIBL) is also estimated by using this model, and the negative capacitance effect retards the short-channel effects significantly. The trend of the experimental data and simulation results of fin field-effect transistors and planar field-effect transistors is consistent with nano-scale and micro-scale devices, respectively.
- Published
- 2020
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