1. Rational design for high-yield monolayer WS2 films in confined space under fast thermal processing
- Author
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Xu Wang, Li Zhan, Qilong Cui, Jun Shen, Jiangbing Yan, Xin Zhang, Hongling Zhang, Chuanqiang Wu, Binghui Ge, Hengqing Cui, Hongbing Wang, and Dong Yang
- Subjects
Materials science ,business.industry ,Mechanical Engineering ,Tungsten disulfide ,Transistor ,Bioengineering ,General Chemistry ,Chemical vapor deposition ,law.invention ,chemistry.chemical_compound ,Transition metal ,chemistry ,Mechanics of Materials ,law ,Yield (chemistry) ,Monolayer ,Thermal ,Optoelectronics ,General Materials Science ,Electrical and Electronic Engineering ,business ,Confined space - Abstract
Tungsten Disulfide (WS2) films, as one of the most attractive members in the family of transition metal dichalcogenides, were synthesized typically on SiO2/Si sub-strate by confine-spaced chemical vapor deposition (CVD) method. The whole pro-cess could be controlled efficiently by precursor concentration and fast thermal pro-cess. To be priority, the effect of fast heating-up to cooling-down process and source ratio-dependent rule for WS2 structure have been systematically studied, leading to high-yield and fine structure of monolayer WS2 films with standard triangular mor-phology and average edge length of 92.4 μm. The growth time of the samples was regulated within 3 minutes, and the optimal source ratio of sulfur to tungsten oxide is about 200:3. The whole experimental duration was about 50 minutes, which is only about quarter in comparison to relevant reports. We assume one type of "multi-nucleation dynamic process" to provide a potential way for fast synthesis of the sam-ples. Finally, the good performance of as-fabricated field-effect transistor (FET) on WS2 film was achieved, which exhibits high electron mobility of 4.62 cm2V−1s−1, fast response rate of 42 ms, and remarkable photoresponsivity of 3.7×10-3A/W. Our work will provide a promising robust way for rapid synthesis of high-quality monolayer TMDs films and pave the way for the potential applications of TMDCs.
- Published
- 2021