1. Tin oxide transparent thin-film transistors
- Author
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Cheol-Hee Park, Douglas A. Keszler, Rick E. Presley, John F. Wager, C. L. Munsee, and David Hong
- Subjects
Materials science ,Acoustics and Ultrasonics ,business.industry ,Transistor ,Sputter deposition ,Condensed Matter Physics ,Tin oxide ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,Thin-film transistor ,law ,Thermal ,Optoelectronics ,Drain current ,business ,Layer (electronics) ,Communication channel - Abstract
A SnO2 transparent thin-film transistor (TTFT) is demonstrated. The SnO2 channel layer is deposited by RF magnetron sputtering and then rapid thermal annealed in O2 at 600°C. The TTFT is highly transparent, and enhancement-mode behaviour is achieved by employing a very thin channel layer (10–20 nm). Maximum field-effect mobilities of 0.8 cm2 V−1 s−1 and 2.0 cm2 V−1 s−1 are obtained for enhancement- and depletion-mode devices, respectively. The transparent nature and the large drain current on-to-off ratio of 105 associated with the enhancement-mode behaviour of these devices may prove useful for novel gas-sensor applications.
- Published
- 2004
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