Author: "Arnal, N" / Publisher: iop publishing - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Arnal, N"' showing total 3 results

Start Over Author "Arnal, N" Publisher iop publishing

3 results on '"Arnal, N"'

1. High Productivity DRIE solutions for 3D-SiP and MEMS Volume Manufacturing

Author: Puech, M, primary, Thevenoud, JM, additional, Launay, N, additional, Arnal, N, additional, Godinat, P, additional, Andrieu, B, additional, and Gruffat, JM, additional
Published: 2006
Full Text: View/download PDF

2. Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers

Author: Sarajli, E, primary, Boer, M J de, additional, Jansen, H V, additional, Arnal, N, additional, Puech, M, additional, Krijnen, G, additional, and Elwenspoek, M, additional
Published: 2004
Full Text: View/download PDF

3. Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers.

Author: Sarajlić, E, Boer, M J de, Jansen, H V, Arnal, N, Puech, M, Krijnen, G, and Elwenspoek, M
Published: 2004
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results