1. A Thru-Only De-Embedding Method Foron-Wafer Characterization of Multiport Networks
- Author
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Noboru Ishihara, Kazuya Masu, and Shuhei Amakawa
- Subjects
Physics ,Matrix (mathematics) ,Transformation matrix ,Transformation (function) ,Reflection symmetry ,Transmission line ,Scattering ,Mathematical analysis ,Hardware_INTEGRATEDCIRCUITS ,Device under test ,Symmetry (geometry) - Abstract
De-embedding is the process of deducing the characteristics of a device under test (DUT) from measurements made at a distance ((Bauer & Penfield, 1974)), often via additional measurements of one or more dummy devices. This article reviews a simple thru-only de-embedding method suitable for on-wafer characterization of 2-port, 4-port, and 2n-port networks having a certain symmetry property. While most conventional de-embedding methods require two or more dummy patterns, the thru-only method requires only one THRU pattern. If the device under measurement is a 2-port and the corresponding THRU pattern has the left/right reflection symmetry, the THRU can be mathematically split into symmetric halves and the scattering matrix for each of them can be determined (Ito & Masu, 2008; Laney, 2003; Nan et al., 2007; Song et al., 2001; Tretiakov et al., 2004a). Once those scattering matrices are available, the effects of pads and leads can be canceled and the characteristics of the device obtained. Themethodwas applied up to 110GHz for characterization of an on-chip transmission line (TL) (Ito & Masu, 2008). In the case of 4-port devices such as differential transmission lines, 4-port THRU patterns with ground-signal-ground-signal-ground (GSGSG) pads or GSSG pads can often be designed to have the even/odd symmetry in addition to the left/right reflection symmetry. In that case, the scattering matrix for a THRU can be transformed into a block-diagonal form representing two independent 2-ports by an even/odd transformation. Then, the 2-port thru-only deembedding method can be applied to the resultant two 2-ports. This 4-port thru-only method was applied to de-embedding of a pair of coupled transmission lines up to 50GHz (Amakawa et al., 2008). The result was found to be approximately consistent with that from the standard open-short method (Koolen et al., 1991), which requires two dummy patterns: OPEN and SHORT. In the above case (Amakawa et al., 2008), the transformation matrix was known a priori because of the nominal symmetry of the THRU. However, if the 4-port THRU does not have the even/odd symmetry or if the device under measurement is a 2n-port with n ≥ 3, the above method cannot be applied. Even if so, the thru-only method can actually be extended to 4-ports without even/odd symmetry or 2n-ports by using the recently proposed S-parameterbased modal decomposition of multiconductor transmission lines (MTLs) (Amakawa et al., 2009). A 2n-port THRU can be regarded as nonuniform multiconductor transmission lines, 2
- Published
- 2021