Search

Your search keyword '"Merugu, Srinivas"' showing total 6 results
Start Over Author "Merugu, Srinivas" Publisher institute of electrical and electronics engineers (ieee)
6 results on '"Merugu, Srinivas"'

2. Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators With $k_{t}^{2}$ Exceeding 4.9%

Author

Jeffrey B.W. Soon, Gianluca Piazza, Navab Singh, Cristian Cassella, Nicolo Oliva, and Merugu Srinivas

Subjects
010302 applied physics, Electromechanical coupling coefficient, Super high frequency, Materials science, Condensed matter physics, business.industry, chemistry.chemical_element, 02 engineering and technology, Nitride, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Piezoelectricity, Resonator, chemistry, Aluminium, 0103 physical sciences, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business
Abstract

In this work we demonstrate high values of electromechanical coupling coefficient ( $k_{t}^{2}$ ) exceeding 4.9% in 1- $\mu \text {m}$ thick Aluminum Nitride (AlN) two-dimensional-mode resonators (2DMRs) operating around 3.2 GHz. Such a high $k_{t}^{2}$ -value, which is attained thanks to the transduction of the resonators through both the $d_{33}$ and $d_{31}$ piezoelectric coefficients of AlN, enables low-power oscillators and low insertion-loss filters, operating in the Super-High-Frequency (SHF) range.

Published
2017
Full Text
View/download PDF

Catalog

Books, media, physical & digital resources
See catalog results