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Under similar test conditions, the electromigration reliability of Al and Cu interconnect trees demonstrate significant differences because of differences in interconnect architectural schemes. The low critical stress for void nucleation at the Cu and interlevel diffusion-barrier interface leads to varying failure characteristics depending on the via position and configuration in a line. Unlike Al technology, a (jL) product-filtering algorithm with a classification of separate via-above and via-below treatments is required for Cu interconnect trees. A methodology and tool for circuit-level interconnect-reliability analyses has been developed. Using data from the literature, the layout-specific circuit-level reliability for Al and dual-damascene Cu metallizations have been compared for various circuits and circuit elements. Significantly improved test-level reliability in Cu is required to achieve equivalent circuit-level reliability. Moreover, the required improvement will increase as low-k/low-modulus dielectrics are introduced, and as liner thicknesses are reduced.

The computer-aided fabrication environment (CAFE) is a software system being developed at the Massachusetts Institute of Technology (MIT) for use in the manufacture of integrated circuits (ICs). CAFE is intended to be used in all phases of process design, development, planning, and manufacturing of IC wafers. While still under active development, CAFE presently provides day-to-day support to research and production facilities at MIT with both standard and flexible product lines. CAFE provides a platform for work in several active research areas at MIT, including technology (process and device) computer-aided design (TCAD), process modeling, manufacturing quality control, and TCAD tool integration. The overall architecture and characteristics of the CAFE system are described. The significant problems solved and the design decisions made are identified, and some of the most important components of the CAFE system as it currently exists are discussed. The CAFE architectural framework supports a wide variety of software modules, including both development tools and on-line applications. The key components of the CAFE architecture are the data model and data base schema, the process flow and wafer representations, the user interface, and the application programming and database interfaces. >

The importance of enlarging and reducing two-level images such as graphical and documentary matter by digital means continues to grow as more such images are digitally represented. A nonlinear scaling scheme is devised which exploits the simplicity of this binary nature, treating images logically instead of arithmetically; a convolution-like effect is achieved without a single addition or multiplication! This method yields high-fidelity digital scaling and meets the objectives of being fast, conducive to hardware realization, and void of special pre-encoding requirements.

A computer-based system for automated engraving of gravure cylinders has been developed and is now used in a normal production environment. Either fully composed pages or individual page components are scanned and stored on a large disk. In the case of fully composed pages, an operator uses a TV display to segment the page image into line and tone areas. The image is then coded by a software process and is ready for subsequent engraving. Prior to the scanning of page components, the operator uses a tablet in order to demark both cropping locations and to specify the location of the components on the final page image. The scanned components are then assembled and coded by a single software process. The encoding process reduces the data storage requirement by a factor of two without any apparent loss of quality. Data are retrieved from disk storage, buffered, decoded, transmitted to a special formatter, and used to drive a Helio Klischograph,® which engraves the cylinder in approximately one hour. Completely arbitrary imposition (the arrangement of pages on the gravure cylinder) is accomplished at the time of engraving. Provision is made for the arbitrary intermixture of computer-processed pages and conventional engraving by means of Cronapaquesgi mounted on the companion scanning machine. The motivation for this development was to reduce the cost and time required for the production of gravure cylinders.

A multiuser multiprocessing image processing system has been developed. It is an interactive picture manipulation and enhancement facility which is capable of executing a variety of image processing operations while simultaneously controlling real-time input and output of pictures. It was designed to provide a reliable picture processing system which would be cost-effective in the commercial production environment. Additional goals met by the system include flexibility and ease of operation and modification.

The transformation of image signals between the continuous domain of the real world and the discrete domain of modern data processing can have a significant effect on quality and efficiency. Analysis based on perceptual rather than mathematical considerations has been carried out. A series of experiments based on the analysis has shown that substantial improvement over usual techniques can be achieved by the use of a cascade of a presharpening filter combined with Gaussian presampling and interpolation filters. The resulting ``sharpened Gaussian'' filter, although not exactly circularly symmetrical, gives a high degree of isotropy. Each element in the cascade is separable, so that computational efficiency is high. A favorable tradeoff is achieved among sharpness, smoothness, and the effects of aliasing. Subjective testing, in comparison with other commonly used filters, has shown the clear superiority of this filter.

The two-channel system previously reported has been implemented in hardware using system parameters appropriate to consumer television. The basic system divides the spectrum into lowand high-frequency spatial components. The lows are coarsely sampled and finely quantized and the highs finely sampled and coarsely quantized using a companded, randomized quantizer. The purpose of this experiment was to demonstrate the potential of the system for low-cost practical application, to study the effect of the character of the randomizing noise, and to ascertain that there were no deleterious effects due to interlace, motion, or input noise. Theoretical noise calculations were qualitatively confirmed.

An explorable electrotactile display has been constructed and tested. A thus far neglected sensation was identified and has been shown to be more useful than the more common electrotactile sensations. Exploration of the surface of the electrotactile display elicits a sensation describable as texture. Experiments have indicated that the intensity of this texture sensation is due primarily to the peak applied voltage rather than to current density as is the case for the classical electrotactile sensation. For subjects employing the texture sensation, experimental results are given for approximate thresholds and for the effect of electrode area on these thresholds. A boundary-localization measurement is offered as a measure of the usefulness of the display for textured-area presentation, and form-separation measurements are given as a measure of usefulness for line-drawing presentations. A proposed model for the mechanism producing the texture sensation is offered as a guide for future experimentation and display-engineering development.

In the past two years a Digital Systems Project Laboratory has been developed within the Department of Electrical Engineering at Massachusetts Institute of Technology. The major objective is to allow the student to acquire a working knowledge of digital systems early in his undergraduate career. The emphasis is experimental, but about one-third of the semester is devoted to classroom activities. The classroom portion of the subject is used to present theoretical material normally unavailable to the student until the latter part of his junior year. However, the principal emphasis, even in the classroom, is on the design and implementation of moderately complex digital systems using integrated circuits at realistic speeds. A modular equipment system is described. An evaluation of the subject has been made by the students and most of them consider it to be as interesting and valuable as most classroom subjects.