1. Study on dispersion property of sub-micro α-Al2O3 powders in water suspension by physical-chemical process
- Author
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Dun Wen Zuo, Ying Xu, Jun Li, Z. G. Liu, S. Y. Tang, Yu Li Sun, and W. Z. Lu
- Subjects
010302 applied physics ,Materials science ,Aqueous solution ,Polishing ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Dispersant ,Electronic, Optical and Magnetic Materials ,Suspension (chemistry) ,Absorbance ,Chemical engineering ,Control and Systems Engineering ,Chemical-mechanical planarization ,0103 physical sciences ,Materials Chemistry ,Ceramics and Composites ,Slurry ,Electrical and Electronic Engineering ,0210 nano-technology ,Dispersion (chemistry) - Abstract
Sub-micro α-Al2O3 polishing liquid is often used as the slurry in chemical mechanical polishing (CMP). At present, water is usually used as dispersion medium to disperse sub-micro α-Al2O3 powders, but the sub-micro α-Al2O3 powders easily subside in aqueous solution. In previous studies, researchers usually used single method to disperse superfine powders, however, the dispersion effect was non-ideal. In order to solve the difficult problem of sub-micro α-Al2O3 powders dispersed in water suspension, firstly, using physical method, the effects of milling time, ultrasonic time on the dispersion property of sub-micro α-Al2O3 powders in water suspension was studied by single factorial test. Then, using chemical method, the effects of dispersant type, dispersant concentration and pH value on the dispersion property of sub-micro α-Al2O3 powders in water suspension was studied by orthogonal test. Absorbance was used to evaluate the dispersion property of sub-micro α-Al2O3 powders. The results show that th...
- Published
- 2017
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