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1. GaAs/AlGaAs quantum cascade lasers with dry etched semiconductor–air Bragg reflectors

Author

Werner Schrenk, Tomas Roch, S. Golka, C. Pflügl, Gottfried Strasser, M. Austerer, and Aaron Maxwell Andrews

Subjects
Materials science, business.industry, Far-infrared laser, Physics::Optics, Bragg's law, Laser, Atomic and Molecular Physics, and Optics, law.invention, Semiconductor laser theory, Semiconductor, Optics, law, Cascade, Optoelectronics, Quantum cascade laser, business, Photonic crystal
Abstract

Electrically pumped GaAs/AlGaAs quantum cascade rib lasers with a wavelength of 9.7 µm utilizing deep etched photonic band gap mirrors are discussed. The smallest operating device was 150 µm long and 8 µm wide. Further, a description of the fabrication process of such high aspect ratio devices is given.

Published
2005

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