1. Time-resolved Langmuir probe measurements in preionised HiPIMS discharge
- Author
-
P Poolcharuansin, Peter Kelly, and James W. Bradley
- Subjects
Pulse (signal processing) ,Plasma parameters ,Chemistry ,Mechanical Engineering ,Plasma ,Condensed Matter Physics ,symbols.namesake ,Mechanics of Materials ,Sputtering ,Ballistic conduction ,Cavity magnetron ,symbols ,Langmuir probe ,General Materials Science ,High-power impulse magnetron sputtering ,Atomic physics - Abstract
By using a time-resolved Langmuir probe, the temporal evolution of plasma parameters (including the electron energy distribution function) in a preionised HiPIMS discharge were investigated for a number of discharge conditions. Assistance from a DC preioniser circuit providing the remnant and ‘active’ charge particles for the subsequence pulse with the delay time of plasma build-up being decreased dramatically to T de
- Published
- 2011