1. Fast and Flexible Non-Null Testing of Aspheres and Free-Form Surfaces with the Tilted-Wave-Interferometer
- Author
-
Wolfgang Osten, Goran Baer, Christof Pruss, Johannes Schindler, and Jens Siepmann
- Subjects
Surface (mathematics) ,Physics ,Wavefront ,Null (radio) ,business.industry ,Mechanical Engineering ,Process (computing) ,Compensation (engineering) ,Interferometry ,Data acquisition ,Optics ,Degree (angle) ,Electrical and Electronic Engineering ,business ,Instrumentation - Abstract
The Tilted-Wave-Interferometer (TWI) is a non-null, full-field interferometric measuring technique for aspheric and free-form surfaces with a new degree of flexibility. The interferometer uses a set of tilted wavefronts to locally compensate the deviation of the surface under test from its spherical form. Since it is a non-null technique, there is no need for costly compensation optics. The measurement data acquisition is highly parallelized, leading to a short measurement time in the region of few seconds, by simultaneously achieving a high lateral resolution. The unique combination of these characteristics makes the TWI a perfect candidate for the integration into the process chain of aspheric and free-form surface manufacturing.
- Published
- 2014
- Full Text
- View/download PDF