1. Impact Ionization and Interface Trap Generation in 28-nm MOSFETs at Cryogenic Temperatures.
- Author
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Yan, Xiaodong, Wang, Han, Barnaby, Hugh, and Sanchez Esqueda, Ivan
- Abstract
The characterization of impact-ionization (II) and stress-induced damage in 28-nm bulk n-channel MOSFETs is used to identify the mechanisms for carrier-induced interface trap generation (ITG) from 300 K to 77 K. The energy-driven paradigm of hot carrier effects is used to study carrier-induced ITG and its temperature dependence, and to analyze the influence of electron-electron scattering (EES) on carrier-induced degradation of ultra-short channel devices. The analysis clearly illustrates the significant role of EES in the hot (i.e., high-energy) carriers single particle mechanism of ITG, as well as its contribution to the cold (i.e., low-energy) carriers multiple particle mechanism of ITG. This is evidenced through extractions of ITG lifetime as a function of temperature and stress current from measurements of 28 nm n-channel devices. We apply a simple model to discuss the impact of EES on the experimentally observed trends for II and ITG rates. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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