1. Ohmic Contact With a Contact Resistivity of 12 Ω ⋅ mm on p-GaN/AlGaN/GaN.
- Author
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Tang, Chu-Ying, Lu, Hong-Hao, Qiao, Ze-Peng, Jiang, Yang, Du, Fang-Zhou, He, Jia-Qi, Jiang, Yu-Long, Wang, Qing, and Yu, Hong-Yu
- Subjects
OHMIC contacts ,GALLIUM nitride ,X-ray imaging ,SURFACE preparation - Abstract
A robust ohmic contact process with ultralow contact resistivity on p-GaN/AlGaN/GaN is demonstrated. An in-situ removal of GaOX interfacial layer after contact metal deposition is developed. Using the novel Mg/Pt/Au stack as the contact metal, a stable ohmic contact is obtained after 450°C/300 s annealing with ohmic contact resistivity of $12 \Omega \cdot {\mathrm {mm}}$ ($1.8\times 10^{-5}\, \Omega \cdot {\mathrm {cm}}^{2}$). A new ohmic contact formation mechanism on p-GaN/AlGaN/GaN is also proposed. [ABSTRACT FROM AUTHOR]
- Published
- 2022
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