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Ultrashort-pulse-laser known as femtosecond (fs) laser has been widely applied in various fields such as electrical, chemical, cell biology and microfluidics researches since the tightly focused fs laser enables 3 dimensional (3D) microfabrication inside the transparent materials. Over the last decades, many research groups have exploited the 3D fs laser processing of the transparent materials from the point of fundamental researches and industrial applications. In this presentation, we discuss recent development of the 3D fs laser fabrication of microfluidics and some other optical components to be integrated to the microfluidic chip. Furthermore, applications of the fs laser fabricated microfluidic chips will be presented in the talk.

We demonstrate the fs laser fabrication of microchip with microchannel integrated with micro pump for the dynamic observation of microorganisms in water. Such microchips, referred to as nano-aquariums realize the efficient observation of microorganisms.

Atomically inhomogeneous deposition was observed in a femtosecond laser ablation of Cu:Zn alloy target using a phase-shifted focused laser beam. Atomic concentration ratio was obtained by the measurement of energy dispersive X-ray analyzer.